JPH0298638U - - Google Patents

Info

Publication number
JPH0298638U
JPH0298638U JP14472189U JP14472189U JPH0298638U JP H0298638 U JPH0298638 U JP H0298638U JP 14472189 U JP14472189 U JP 14472189U JP 14472189 U JP14472189 U JP 14472189U JP H0298638 U JPH0298638 U JP H0298638U
Authority
JP
Japan
Prior art keywords
suction head
head support
support tube
rollers
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14472189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14472189U priority Critical patent/JPH0298638U/ja
Publication of JPH0298638U publication Critical patent/JPH0298638U/ja
Pending legal-status Critical Current

Links

JP14472189U 1989-12-15 1989-12-15 Pending JPH0298638U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14472189U JPH0298638U (enrdf_load_stackoverflow) 1989-12-15 1989-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14472189U JPH0298638U (enrdf_load_stackoverflow) 1989-12-15 1989-12-15

Publications (1)

Publication Number Publication Date
JPH0298638U true JPH0298638U (enrdf_load_stackoverflow) 1990-08-06

Family

ID=31412674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14472189U Pending JPH0298638U (enrdf_load_stackoverflow) 1989-12-15 1989-12-15

Country Status (1)

Country Link
JP (1) JPH0298638U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置
JPS6226038B2 (enrdf_load_stackoverflow) * 1979-10-04 1987-06-05 Sanyo Electric Co

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226038B2 (enrdf_load_stackoverflow) * 1979-10-04 1987-06-05 Sanyo Electric Co
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置

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