JPH0298629U - - Google Patents

Info

Publication number
JPH0298629U
JPH0298629U JP665889U JP665889U JPH0298629U JP H0298629 U JPH0298629 U JP H0298629U JP 665889 U JP665889 U JP 665889U JP 665889 U JP665889 U JP 665889U JP H0298629 U JPH0298629 U JP H0298629U
Authority
JP
Japan
Prior art keywords
vacuum container
gas introduction
introduction tube
ashing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP665889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP665889U priority Critical patent/JPH0298629U/ja
Publication of JPH0298629U publication Critical patent/JPH0298629U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP665889U 1989-01-24 1989-01-24 Pending JPH0298629U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP665889U JPH0298629U (US08063081-20111122-C00044.png) 1989-01-24 1989-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP665889U JPH0298629U (US08063081-20111122-C00044.png) 1989-01-24 1989-01-24

Publications (1)

Publication Number Publication Date
JPH0298629U true JPH0298629U (US08063081-20111122-C00044.png) 1990-08-06

Family

ID=31211010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP665889U Pending JPH0298629U (US08063081-20111122-C00044.png) 1989-01-24 1989-01-24

Country Status (1)

Country Link
JP (1) JPH0298629U (US08063081-20111122-C00044.png)

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