JPH0296734U - - Google Patents
Info
- Publication number
- JPH0296734U JPH0296734U JP489389U JP489389U JPH0296734U JP H0296734 U JPH0296734 U JP H0296734U JP 489389 U JP489389 U JP 489389U JP 489389 U JP489389 U JP 489389U JP H0296734 U JPH0296734 U JP H0296734U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- divided
- suction part
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP489389U JPH0296734U (nl) | 1989-01-19 | 1989-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP489389U JPH0296734U (nl) | 1989-01-19 | 1989-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0296734U true JPH0296734U (nl) | 1990-08-01 |
Family
ID=31207803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP489389U Pending JPH0296734U (nl) | 1989-01-19 | 1989-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0296734U (nl) |
-
1989
- 1989-01-19 JP JP489389U patent/JPH0296734U/ja active Pending