JPH0296722U - - Google Patents
Info
- Publication number
- JPH0296722U JPH0296722U JP482389U JP482389U JPH0296722U JP H0296722 U JPH0296722 U JP H0296722U JP 482389 U JP482389 U JP 482389U JP 482389 U JP482389 U JP 482389U JP H0296722 U JPH0296722 U JP H0296722U
- Authority
- JP
- Japan
- Prior art keywords
- inner tube
- tube
- outer tube
- gas
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910020323 ClF3 Inorganic materials 0.000 claims 1
- 101100441092 Danio rerio crlf3 gene Proteins 0.000 claims 1
- 229920002449 FKM Polymers 0.000 claims 1
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP482389U JPH0296722U (https=) | 1989-01-19 | 1989-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP482389U JPH0296722U (https=) | 1989-01-19 | 1989-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0296722U true JPH0296722U (https=) | 1990-08-01 |
Family
ID=31207677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP482389U Pending JPH0296722U (https=) | 1989-01-19 | 1989-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0296722U (https=) |
-
1989
- 1989-01-19 JP JP482389U patent/JPH0296722U/ja active Pending
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