JPH0295853U - - Google Patents
Info
- Publication number
- JPH0295853U JPH0295853U JP16125088U JP16125088U JPH0295853U JP H0295853 U JPH0295853 U JP H0295853U JP 16125088 U JP16125088 U JP 16125088U JP 16125088 U JP16125088 U JP 16125088U JP H0295853 U JPH0295853 U JP H0295853U
- Authority
- JP
- Japan
- Prior art keywords
- partial pressure
- oxygen partial
- substrate
- pressure sensor
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16125088U JPH0295853U (de) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16125088U JPH0295853U (de) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295853U true JPH0295853U (de) | 1990-07-31 |
Family
ID=31444018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16125088U Pending JPH0295853U (de) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295853U (de) |
-
1988
- 1988-12-14 JP JP16125088U patent/JPH0295853U/ja active Pending