JPH0295234U - - Google Patents

Info

Publication number
JPH0295234U
JPH0295234U JP323489U JP323489U JPH0295234U JP H0295234 U JPH0295234 U JP H0295234U JP 323489 U JP323489 U JP 323489U JP 323489 U JP323489 U JP 323489U JP H0295234 U JPH0295234 U JP H0295234U
Authority
JP
Japan
Prior art keywords
processing apparatus
plasma
gas inlet
gas
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP323489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP323489U priority Critical patent/JPH0295234U/ja
Publication of JPH0295234U publication Critical patent/JPH0295234U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP323489U 1989-01-13 1989-01-13 Pending JPH0295234U (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP323489U JPH0295234U (US07847105-20101207-C00016.png) 1989-01-13 1989-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP323489U JPH0295234U (US07847105-20101207-C00016.png) 1989-01-13 1989-01-13

Publications (1)

Publication Number Publication Date
JPH0295234U true JPH0295234U (US07847105-20101207-C00016.png) 1990-07-30

Family

ID=31204689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP323489U Pending JPH0295234U (US07847105-20101207-C00016.png) 1989-01-13 1989-01-13

Country Status (1)

Country Link
JP (1) JPH0295234U (US07847105-20101207-C00016.png)

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