JPH029428U - - Google Patents
Info
- Publication number
- JPH029428U JPH029428U JP8779388U JP8779388U JPH029428U JP H029428 U JPH029428 U JP H029428U JP 8779388 U JP8779388 U JP 8779388U JP 8779388 U JP8779388 U JP 8779388U JP H029428 U JPH029428 U JP H029428U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- check pattern
- integrated circuit
- view
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779388U JPH029428U (enExample) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779388U JPH029428U (enExample) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029428U true JPH029428U (enExample) | 1990-01-22 |
Family
ID=31312389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8779388U Pending JPH029428U (enExample) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029428U (enExample) |
-
1988
- 1988-06-30 JP JP8779388U patent/JPH029428U/ja active Pending