JPH0294253U - - Google Patents

Info

Publication number
JPH0294253U
JPH0294253U JP76289U JP76289U JPH0294253U JP H0294253 U JPH0294253 U JP H0294253U JP 76289 U JP76289 U JP 76289U JP 76289 U JP76289 U JP 76289U JP H0294253 U JPH0294253 U JP H0294253U
Authority
JP
Japan
Prior art keywords
processing chamber
base
prevention plate
deposition prevention
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP76289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP76289U priority Critical patent/JPH0294253U/ja
Publication of JPH0294253U publication Critical patent/JPH0294253U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP76289U 1989-01-07 1989-01-07 Pending JPH0294253U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP76289U JPH0294253U (enrdf_load_html_response) 1989-01-07 1989-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP76289U JPH0294253U (enrdf_load_html_response) 1989-01-07 1989-01-07

Publications (1)

Publication Number Publication Date
JPH0294253U true JPH0294253U (enrdf_load_html_response) 1990-07-26

Family

ID=31200069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP76289U Pending JPH0294253U (enrdf_load_html_response) 1989-01-07 1989-01-07

Country Status (1)

Country Link
JP (1) JPH0294253U (enrdf_load_html_response)

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