JPH029424U - - Google Patents
Info
- Publication number
- JPH029424U JPH029424U JP8657688U JP8657688U JPH029424U JP H029424 U JPH029424 U JP H029424U JP 8657688 U JP8657688 U JP 8657688U JP 8657688 U JP8657688 U JP 8657688U JP H029424 U JPH029424 U JP H029424U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotation speed
- developing device
- resist
- resist developing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657688U JPH029424U (sl) | 1988-07-01 | 1988-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657688U JPH029424U (sl) | 1988-07-01 | 1988-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029424U true JPH029424U (sl) | 1990-01-22 |
Family
ID=31311214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8657688U Pending JPH029424U (sl) | 1988-07-01 | 1988-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029424U (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293135A (ja) * | 1985-06-18 | 1986-12-23 | Ozen Corp | ミニチユアモ−タの冷却装置 |
-
1988
- 1988-07-01 JP JP8657688U patent/JPH029424U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293135A (ja) * | 1985-06-18 | 1986-12-23 | Ozen Corp | ミニチユアモ−タの冷却装置 |
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