JPH0294050U - - Google Patents

Info

Publication number
JPH0294050U
JPH0294050U JP158689U JP158689U JPH0294050U JP H0294050 U JPH0294050 U JP H0294050U JP 158689 U JP158689 U JP 158689U JP 158689 U JP158689 U JP 158689U JP H0294050 U JPH0294050 U JP H0294050U
Authority
JP
Japan
Prior art keywords
piezoelectric element
tracing stylus
tracer head
incorporated
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP158689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP158689U priority Critical patent/JPH0294050U/ja
Publication of JPH0294050U publication Critical patent/JPH0294050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Copy Controls (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP158689U 1989-01-12 1989-01-12 Pending JPH0294050U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP158689U JPH0294050U (fr) 1989-01-12 1989-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP158689U JPH0294050U (fr) 1989-01-12 1989-01-12

Publications (1)

Publication Number Publication Date
JPH0294050U true JPH0294050U (fr) 1990-07-26

Family

ID=31201598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP158689U Pending JPH0294050U (fr) 1989-01-12 1989-01-12

Country Status (1)

Country Link
JP (1) JPH0294050U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (ja) * 2006-11-06 2008-05-22 Nec Electronics Corp 反り測定システム、成膜システム、及び反り測定方法
JP2014167435A (ja) * 2013-02-28 2014-09-11 Mitsutoyo Corp 形状測定機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (ja) * 2006-11-06 2008-05-22 Nec Electronics Corp 反り測定システム、成膜システム、及び反り測定方法
JP2014167435A (ja) * 2013-02-28 2014-09-11 Mitsutoyo Corp 形状測定機

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