JPH0292923U - - Google Patents
Info
- Publication number
- JPH0292923U JPH0292923U JP169689U JP169689U JPH0292923U JP H0292923 U JPH0292923 U JP H0292923U JP 169689 U JP169689 U JP 169689U JP 169689 U JP169689 U JP 169689U JP H0292923 U JPH0292923 U JP H0292923U
- Authority
- JP
- Japan
- Prior art keywords
- support
- wafer
- base
- erected
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示す側面図、第２
図は第１図のＡ―Ａ線断面図、第３図は従来のウ
エハ支持具の側面図、第４図は第３図のＢ―Ｂ線
断面図である。
１……ウエハ支持具、２……基台、３……支柱
、４……補助板、５……ウエハ。
Figure 1 is a side view showing one embodiment of the present invention;
The figures are a sectional view taken along the line AA in FIG. 1, FIG. 3 is a side view of a conventional wafer support, and FIG. 4 is a sectional view taken along the line BB in FIG. 1... Wafer supporter, 2... Base, 3... Strut, 4... Auxiliary plate, 5... Wafer.
Claims (1)
するウエハ支持具において、前記基台を円筒体と
したことを特徴とするウエハ支持具。 A wafer support in which a support is erected on a base and a wafer is supported by the support, characterized in that the base is a cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP169689U JPH0292923U (en) | 1989-01-11 | 1989-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP169689U JPH0292923U (en) | 1989-01-11 | 1989-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0292923U true JPH0292923U (en) | 1990-07-24 |
Family
ID=31201808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP169689U Pending JPH0292923U (en) | 1989-01-11 | 1989-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0292923U (en) |
-
1989
- 1989-01-11 JP JP169689U patent/JPH0292923U/ja active Pending