JPH0292400U - - Google Patents

Info

Publication number
JPH0292400U
JPH0292400U JP197089U JP197089U JPH0292400U JP H0292400 U JPH0292400 U JP H0292400U JP 197089 U JP197089 U JP 197089U JP 197089 U JP197089 U JP 197089U JP H0292400 U JPH0292400 U JP H0292400U
Authority
JP
Japan
Prior art keywords
holes
stopper
connector
bellows
supplies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP197089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP197089U priority Critical patent/JPH0292400U/ja
Publication of JPH0292400U publication Critical patent/JPH0292400U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP197089U 1989-01-11 1989-01-11 Pending JPH0292400U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP197089U JPH0292400U (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP197089U JPH0292400U (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Publications (1)

Publication Number Publication Date
JPH0292400U true JPH0292400U (enrdf_load_stackoverflow) 1990-07-23

Family

ID=31202329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP197089U Pending JPH0292400U (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Country Status (1)

Country Link
JP (1) JPH0292400U (enrdf_load_stackoverflow)

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