JPH0291829A - Optical head device - Google Patents

Optical head device

Info

Publication number
JPH0291829A
JPH0291829A JP63245063A JP24506388A JPH0291829A JP H0291829 A JPH0291829 A JP H0291829A JP 63245063 A JP63245063 A JP 63245063A JP 24506388 A JP24506388 A JP 24506388A JP H0291829 A JPH0291829 A JP H0291829A
Authority
JP
Japan
Prior art keywords
light
optical
section
side lobe
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63245063A
Other languages
Japanese (ja)
Other versions
JP2586600B2 (en
Inventor
Yutaka Hirose
裕 廣瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63245063A priority Critical patent/JP2586600B2/en
Priority to EP94120116A priority patent/EP0646911A3/en
Priority to EP89110712A priority patent/EP0346844B1/en
Priority to DE68924303T priority patent/DE68924303T2/en
Priority to US07/366,073 priority patent/US5121378A/en
Publication of JPH0291829A publication Critical patent/JPH0291829A/en
Application granted granted Critical
Publication of JP2586600B2 publication Critical patent/JP2586600B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Head (AREA)

Abstract

PURPOSE:To obtain an optical head which can make high-density recording by providing a means, which shading the central part of the cross section of an optical beam, but transmits the light of the peripheral part of the cross section, and another means which shades the transmitted peripheral part of the optical beam. CONSTITUTION:An optical beam from a light source 1 is inputted to an optical modulator 3. A light shielding band 21 which shades the central part of the cross section 22 of the optical beam and another shielding band which shades the peripheral section of the cross section 22 are provided on the modulator 3. Therefore, the optical intensity of a converged spot on the surface of a recording medium 5 is as the distribution shown in Fig. (f). The main beam 26 shows the same intensity distribution as that obtained when single light shielding band is used and, while the secondary or higher side lobe 28 in which the primary side lobe 27 becomes sufficiently smaller is slightly higher, but lower than that shown in the distribution diagram (c). When both of the central light shielding band width and peripheral light transmissive band width are 0.5mm, the diameter of the main beam is about 1mum and, in addition, the primary side lobe becomes the 1/4 of that when the single light shielding band is used. Therefore, formation of erroneous bits by the side lobe is eliminated and high-density recording can be performed.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、光を利用して情報の記録再生を行なう情報入
出力装置に用いる光ヘッド装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an optical head device used in an information input/output device that records and reproduces information using light.

(従来の技術) 現在、光を利用して、情報9記録再生を行う情報入出力
装置においては、ディスク状の記録媒体に同心円、また
はスパイラル状のトラックを設け、このトラック上にレ
ーザ光源からの出射光を微小スポットとして集光するこ
とによって記録ピットを生成し、前記ピットの有無を情
報として記録し、さらにこのトラックに微小スポットを
照射し、反射光よりトラック上のピットの有無を検出し
、情報の読み出しを行うというものがある。
(Prior Art) Currently, in information input/output devices that record and reproduce information using light, concentric or spiral tracks are provided on a disk-shaped recording medium, and light from a laser light source is placed on these tracks. A recording pit is generated by focusing the emitted light as a minute spot, the presence or absence of the pit is recorded as information, the minute spot is irradiated onto the track, and the presence or absence of the pit on the track is detected from the reflected light, There is a method for reading information.

近年、記憶容量増大化の要請に伴い、このような装置に
おいて、記録密度を高めることが必要となっている。記
憶容量は記録媒体上に生成できる前記記録ピットの数に
依存しているので、記録ピットを小さくすること、すな
わち媒体上に照射する光のスポットを小さくすることが
、高密度化のためには不可欠である。媒体上に照射され
る微小スポットの大きさは、レーザの波長λ及び、集光
レンズの開口数NAに依存しており、MNAに比例する
。従って、微小スポットの大きさを小さくするには、λ
を小さくNAを大きくする必要がある。このため、光デ
イスク用の半導体レーザの発振波長はより短くするとい
う方向で開発が進められており、集光゛レンズの開口は
できる限り大きいものが使われている。
In recent years, with the demand for increased storage capacity, it has become necessary to increase the recording density in such devices. Since storage capacity depends on the number of recording pits that can be generated on a recording medium, making the recording pits smaller, that is, reducing the spot of light irradiated onto the medium, is the key to higher density. It is essential. The size of the minute spot irradiated onto the medium depends on the wavelength λ of the laser and the numerical aperture NA of the condensing lens, and is proportional to MNA. Therefore, in order to reduce the size of the minute spot, λ
It is necessary to make the value smaller and the NA larger. For this reason, development is progressing in the direction of shortening the oscillation wavelength of semiconductor lasers for optical disks, and the aperture of the converging lens is being used as large as possible.

ところが、この方法では、媒体上に照射される微小スポ
ットの大きさは、光源の波長及び、集光レンズの開口数
で決まる回折限界値よりも小さくすることができない。
However, with this method, the size of the minute spot irradiated onto the medium cannot be made smaller than the diffraction limit value determined by the wavelength of the light source and the numerical aperture of the condensing lens.

したがって、記録密度もこの値で決まる値よりも高める
ことができないという欠点があった。
Therefore, there was a drawback that the recording density could not be increased beyond the value determined by this value.

一方、従来から、光ビームの中心部分の光強度を弱め、
集光レンズで集光すると、ビームスポットの大きさを回
折限界値よりも小さくできること(超解像技術)が知ら
れている。(例えば、文献オスターバーブ、ウィルキン
ス著、ジャーナルオブザオプティカルソサイアティオブ
アメリカ(H。
On the other hand, conventional methods have been used to weaken the light intensity at the center of the light beam.
It is known that by condensing light with a condenser lens, the beam spot size can be made smaller than the diffraction limit (super-resolution technology). (For example, see References Osterbarb, Wilkins, Journal of the Optical Society of America (H.

Osterberg and J、 E、 Wilki
ns、Jr、、 J、 Opt、 Soc、 Am、 
39゜553 (1949)を参照) 第2図(a)〜(c)に超解像技術について示す。図(
a)に示すように光ビーム22の中心部に遮光帯を設け
、光強度分布を図(b)に示すようにする。これを集光
レンズで集光すると、その焦点での光強度分布は図(e
)に実線24で示すようになる。図(c)の点線23は
遮光帯を設けない場合の分布で、これと比較してもわか
るとおり、遮光帯を設けることによってビームスポット
を小さくできる。この時の遮光帯幅とビームスポット径
の関係を第3図に示す。図において、31は光強度が最
大値の1/e2となる位置におけるビーム径、32は光
強度が最大値の1/2となる位置におけるビーム径を示
す。これより小さいビームスポットを得るためには遮光
帯幅を広くすれば良いことがわかる。
Osterberg and J, E, Wilki
ns, Jr,, J, Opt, Soc, Am,
39°553 (1949)) The super-resolution technique is shown in FIGS. 2(a) to 2(c). figure(
As shown in Figure (a), a light shielding band is provided at the center of the light beam 22, and the light intensity distribution is made as shown in Figure (b). When this is condensed by a condensing lens, the light intensity distribution at the focal point is as shown in the figure (e
) as shown by a solid line 24. The dotted line 23 in Figure (c) shows the distribution when no shading zone is provided, and as can be seen from the comparison, the beam spot can be made smaller by providing the shading zone. The relationship between the shading band width and the beam spot diameter at this time is shown in FIG. In the figure, 31 indicates a beam diameter at a position where the light intensity becomes 1/e2 of the maximum value, and 32 indicates a beam diameter at a position where the light intensity becomes 1/2 of the maximum value. It can be seen that in order to obtain a beam spot smaller than this, it is sufficient to widen the shading band width.

(発明が解決しようとする課題) しかし、遮光帯幅を広くすると、第3図(b)に示すよ
うにサイドローブ25の強度が強くなる。ところで、超
解像技術を光ヘッド装置に適用する場合、隣接ビットへ
の悪影響をなくすためにサイドローブ25の強度はメイ
ンビームの強度の1/3以下にしなければならない。し
たがって、遮光帯幅をむやみに広くすることができず、
メインビーム径も約1.05pm程度にしかできず、こ
れより細くすることができなかった。
(Problem to be Solved by the Invention) However, when the width of the light-shielding band is widened, the intensity of the side lobe 25 increases as shown in FIG. 3(b). By the way, when super-resolution technology is applied to an optical head device, the intensity of the side lobe 25 must be 1/3 or less of the intensity of the main beam in order to eliminate adverse effects on adjacent bits. Therefore, the width of the shading zone cannot be unnecessarily widened,
The main beam diameter could only be about 1.05 pm, and it was not possible to make it thinner than this.

本発明の目的は、上記課題を除き、高密度記録を可能と
する光ヘッド装置を提供することにある。
An object of the present invention is to provide an optical head device that eliminates the above problems and enables high-density recording.

(課題を解決するための手段) 本発明は、光源と、この光源からの出射光を微小スポッ
トとして記録媒体面上に集光する集光レンズと、この集
光点からの反射光を検出する光検出器とからなる光ヘッ
ド装置において、前記光源からの出射光ビーム断面内の
中心付近において中心部分の光を遮断しその周辺部分の
光は透過させ、さらにその周辺部分の光を遮断する手段
を有することを特徴とする光ヘッド装置である。
(Means for Solving the Problems) The present invention includes a light source, a condensing lens that condenses the light emitted from the light source as a minute spot onto the surface of a recording medium, and detects reflected light from this condensing point. In an optical head device comprising a photodetector, means for blocking light in a central portion near the center of a cross section of a light beam emitted from the light source, transmitting light in a peripheral portion thereof, and further blocking light in the peripheral portion; This is an optical head device characterized by having the following.

(作用) 第2図(d)に示すように遮光帯の構造を中心部分の幅
を挾め、その周辺部分の光を透過させ、さらにその周辺
部に遮光帯を設けたものとすると、記録媒体面上の集光
スポットの光強度部分は同図(0に示す如きとなり、メ
インビーム26は図(C)と同様のまま、同図(e)に
比して一次のサイドローブ27を十分小さくすることが
可能である。二次以下のサイドローブ28は、同図(C
)はに比して高いが、同図(C)の−次のサイドローブ
25に比べれば十分低く、例えば、第4図において中心
部遮光帯幅Δwo及びその周辺部の光透過部幅ΔUをと
もに0.5mmとし、二次遮光帯幅Δw1を0.25と
したとき、メインビーム径は約1.011mであり、か
つ−次のサイドローブ高さは、第2図(a)の場合の約
1/4となる。この時、サイドローブによる誤ピットの
形成という副作用は除去される。
(Function) As shown in Fig. 2(d), if the structure of the light-shielding band is such that the width of the central part is sandwiched, the light from the peripheral part is transmitted, and the light-shielding band is provided around the peripheral part, the recording The light intensity portion of the condensed spot on the medium surface is as shown in the same figure (0), and the main beam 26 remains the same as in figure (C), but the primary side lobe 27 is sufficiently reduced compared to figure (e). It is possible to make the side lobe 28 smaller than the second order as shown in the same figure (C
) is high compared to , but it is sufficiently low compared to the − next side lobe 25 in FIG. 4 (C). For example, in FIG. When both are 0.5 mm and the secondary shading band width Δw1 is 0.25, the main beam diameter is approximately 1.011 m, and the -th side lobe height is as shown in Fig. 2 (a). It will be about 1/4. At this time, the side effect of forming false pits due to side lobes is eliminated.

(実施例) 次に第1図から、第8図を参照して、本発明の実施例に
ついて説明する。
(Example) Next, an example of the present invention will be described with reference to FIG. 1 to FIG. 8.

第1図は、本発明の一実施例の光学系を示す図である。FIG. 1 is a diagram showing an optical system according to an embodiment of the present invention.

記録時においては、レーザ光源1から出射した光は、光
強度変調器3を通過後、第2図(e)に示した強度パタ
ーンとなって集光レンズ4に入射する。
During recording, the light emitted from the laser light source 1 passes through the light intensity modulator 3 and then enters the condenser lens 4 in an intensity pattern shown in FIG. 2(e).

集光レンズの焦点面すなわち記録媒体面上において、第
2図(0で示したパターンとして集光され、情報の記録
が行われる。再生時においては、ディスクからの反射光
はレンズ4を通過後、ビームスプリッタ2によって信号
検出系6に導かれる。
On the focal plane of the condensing lens, that is, on the recording medium surface, the light is condensed in the pattern shown in FIG. , is guided to a signal detection system 6 by a beam splitter 2.

第5図に本発明に用いた、光変調器の実施例を示す。同
図(a)は光を透過させることで変調動作を行う透過型
光変調器の例である。材料は金属、非金属、あるいは木
製でも良いが、遮光部分51は完全に光を遮断する塗装
処理を施す必要がある。52は光の透過部である。同図
(b)は光を反射することで変調動作を行う反射型光変
調器の実施例である。
FIG. 5 shows an embodiment of the optical modulator used in the present invention. FIG. 5A shows an example of a transmission type optical modulator that performs a modulation operation by transmitting light. The material may be metal, non-metal, or wood, but the light-shielding portion 51 must be painted to completely block light. 52 is a light transmitting section. FIG. 2B shows an embodiment of a reflective optical modulator that performs a modulation operation by reflecting light.

光を反射する鏡面55に無反射部56を設けたものであ
る。また、第5図(C)は遮光部分に液晶を利用した、
電界制御可能な透過型の変調器の実施例の一つである。
A non-reflective portion 56 is provided on a mirror surface 55 that reflects light. In addition, Fig. 5 (C) shows a case where liquid crystal is used for the light shielding part.
This is one example of a transmissive modulator that can control the electric field.

すなわち、液晶53の端面に透明電極57をとりつけ、
その前後に偏光板54を配置することで変調動作を電極
に加える電界によって切り替えることが可能となる。記
録時には、変調動作を行い、再生時には変調動作を施さ
ないビームで再生する場合の切り替えなどに有効である
。また、同図(d)は遮光部分を一次元の帯状ではなく
輪帯としたものである。超解像動作は、光軸を含む任意
の断面において第2図(OのX軸方向を半径方向とした
場合と同等の方向に生じる。これによって、二次元方向
の超解像動作が可能となる。
That is, a transparent electrode 57 is attached to the end face of the liquid crystal 53,
By arranging the polarizing plate 54 before and after the polarizing plate 54, the modulation operation can be switched by the electric field applied to the electrode. This is effective for switching when a modulation operation is performed during recording and reproduction is performed using a beam that is not modulated during reproduction. In addition, in FIG. 3(d), the light-shielding portion is not a one-dimensional band shape but a ring zone. Super-resolution operation occurs in an arbitrary cross section including the optical axis in the same direction as when the X-axis direction of O is set as the radial direction in Figure 2.This allows super-resolution operation in two-dimensional directions. Become.

第6図は、第5図(b)の反射型光変調器を用いた場合
の実施例である。第1図と同じものは同じ符号で示した
。半導体レーザ1から出射された光は光強度変調器3で
反射される。この反射光は第1図の透過型の光強度変調
器を透過した光と同じ光強度分布となる。その他の構成
は第1図の例と同様である。
FIG. 6 shows an embodiment using the reflective optical modulator shown in FIG. 5(b). Components that are the same as in FIG. 1 are indicated by the same symbols. Light emitted from the semiconductor laser 1 is reflected by the optical intensity modulator 3. This reflected light has the same light intensity distribution as the light transmitted through the transmission type light intensity modulator shown in FIG. The other configurations are similar to the example shown in FIG.

第7図は、再生光学系においてディスクからの反射光を
ビームスプリッタで取り出し、これをレンズ71によっ
て再集光し、その焦点面においてディスク面上とほぼ相
似の強度分布パターンを形成し、そのサイドローブ成分
を示すようにスリット72によって除去した後、検出器
73に導く方式の一実施例である。再集光レンズの焦点
面において、スリットあるいは開口などを用いてサイド
ローブを遮断し、メインローブのみ検出器に導くことに
よって、サイドローブの影響の少ないより良好な再生信
号を得ることが可能となる。集光レンズおよび再集光レ
ンズの焦点距離を各々f0、f2とすれば、スリット幅
11は約d(f2/f、)pmとなる。ここでdは記録
媒体面上におけるメインビームスポット径を表わす。d
央1pm、 f1=3..9mm、 f2’:40mm
とすれば1□は約10pmとなる。この発明において、
光学系の小型化を図るためには、再集光レンズの焦点距
離を短くする必要があるが、例えばf1=f2とすると
、スリット幅は約1pm程度となり、光軸調整が非常に
高い精度で要求され、製作が難しくなる。一方、本発明
を用いれば除去すべきサイドローブ成分は二次以上の成
分であるため、スリットの幅も二次のサイドローブ間の
距離だけあれば十分であるため、その分焦点距離の短い
再集光レンズを採用することができる。従って、本発明
を用いることにより、再集光光学系を用いる方式におい
ては従来よりも光学系を小型化することが可能となる。
FIG. 7 shows that in the reproduction optical system, reflected light from the disk is taken out by a beam splitter, refocused by a lens 71, and an intensity distribution pattern that is almost similar to that on the disk surface is formed at its focal plane. This is an example of a method in which a lobe component is removed by a slit 72 as shown, and then guided to a detector 73. By blocking the side lobes using a slit or aperture in the focal plane of the refocusing lens and guiding only the main lobe to the detector, it is possible to obtain a better reproduced signal with less influence from the side lobes. . If the focal lengths of the condensing lens and the refocusing lens are f0 and f2, respectively, then the slit width 11 is approximately d(f2/f,)pm. Here, d represents the main beam spot diameter on the recording medium surface. d
Center 1pm, f1=3. .. 9mm, f2': 40mm
Then, 1□ is approximately 10 pm. In this invention,
In order to miniaturize the optical system, it is necessary to shorten the focal length of the refocusing lens. For example, if f1 = f2, the slit width will be approximately 1 pm, making it possible to adjust the optical axis with very high precision. required and difficult to produce. On the other hand, if the present invention is used, the sidelobe components to be removed are secondary or higher-order components, so the slit width only needs to be the distance between the secondary sidelobes. A condensing lens can be used. Therefore, by using the present invention, in a system using a refocusing optical system, it is possible to make the optical system smaller than before.

(発明の効果) 本発明の光ヘッド装置では、光ビーム断面内の中心部分
の光を遮断し、その周辺部分の光を透過させ、さらにそ
の周辺部分の光を遮断する手段を設けることによって、
高密度記録が可能となった。
(Effects of the Invention) In the optical head device of the present invention, by providing means for blocking light in the central portion of the cross section of the light beam, transmitting light in the peripheral portion, and further blocking light in the peripheral portion,
High-density recording became possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明を用いた一実施例を示す図、第2図(a
)〜(Oは本発明の効果を示す図、第3図(a)は従来
の光変調器の遮光帯幅とメインビーム径の関係を示す図
、第3図(b)は遮光帯幅とサイドローブ高さの間の関
係を示す図、第4図は本発明の遮光部と透過部の関係を
示す図、第5図(a)〜(d)は本発明に用いる光変調
器の実施例を示す図、第6図は光変調器に反射型のもの
を用いたときの一実施例の光学系を示す図、第7図は再
生光学系において改良光学系を用いた実施例を示す図で
ある。 図において 1・・・半導体レーザ、2・・・ビームスプリッタ、3
・・・光強度変調器、4・・・集光レンズ、5・・・記
録媒体、6・・・信号検出系、21・・・遮光帯、22
・・・光ビーム断面、 23・・・遮光帯を用いない時の集光スポットのメイン
ローブ、 24・・・遮光帯を用いたときの集光スポットのメイン
ローブ、 25・・・遮光帯を用いたときの集光スポットのサイド
ローブ、 26・・・本発明を用いた場合の集光スポットメインロ
ーブ、 27・・・本発明を用いた場合の集光スポットの一次の
サイドローブ、 28・・・本発明を用いた場合の集光スポットの二次の
サイドローブ、 31・・・光強度が最大値の1/e2となる位置におけ
るビーム径、 32・・・光強度が最大値の1/2となる位置における
ビーム径、 51・・・本発明に用いる光変調器の遮光領域、52・
・・本発明に用いる光変調器の光の通過領域、53・・
・液晶、54・・・偏光子、55・・・鏡面、56・・
・無反射部、57・・・透明電極、71・・・再集光レ
ンズ、 73・・・光検出器 である。 72・・・スリット、
FIG. 1 is a diagram showing an embodiment using the present invention, and FIG. 2 (a
) to (O is a diagram showing the effect of the present invention, FIG. 3(a) is a diagram showing the relationship between the shading band width and main beam diameter of a conventional optical modulator, and FIG. 3(b) is a diagram showing the relationship between the shading band width and the main beam diameter. FIG. 4 is a diagram showing the relationship between the sidelobe heights, FIG. 4 is a diagram showing the relationship between the light shielding part and the transmitting part of the present invention, and FIGS. 5(a) to (d) are diagrams showing the implementation of the optical modulator used in the present invention. Figure 6 shows an example optical system when a reflection type optical modulator is used. Figure 7 shows an example using an improved optical system in the reproduction optical system. In the figure, 1... semiconductor laser, 2... beam splitter, 3
... Light intensity modulator, 4... Condensing lens, 5... Recording medium, 6... Signal detection system, 21... Shading zone, 22
...Light beam cross section, 23... Main lobe of the focused spot when no shading band is used, 24... Main lobe of the focused spot when using the shading band, 25... Main lobe of the focused spot when the shading band is used. Side lobe of the focused spot when using the present invention, 26... Main lobe of the focused spot when using the present invention, 27... Primary side lobe of the focused spot when using the present invention, 28. ...Secondary side lobe of the focused spot when using the present invention, 31... Beam diameter at the position where the light intensity is 1/e2 of the maximum value, 32... 1 where the light intensity is the maximum value /2 beam diameter, 51... light shielding area of the optical modulator used in the present invention, 52...
... Light passage area of the optical modulator used in the present invention, 53...
・Liquid crystal, 54...Polarizer, 55...Mirror surface, 56...
- Non-reflection part, 57... Transparent electrode, 71... Refocusing lens, 73... Photodetector. 72...slit,

Claims (1)

【特許請求の範囲】[Claims] 光源と、この光源からの出射光を微小スポットとして記
録媒体面上に集光する集光レンズと、この集光点からの
反射光を検出する光検出器とからなる光ヘッド装置にお
いて、前記光源からの出射光ビーム断面内の中心付近に
おいて中心部分の光を遮断し、その周辺部分の光を透過
させ、さらにその周辺部分の光を遮断する手段を有する
ことを特徴とする光ヘッド装置。
In an optical head device comprising a light source, a condensing lens that condenses light emitted from the light source as a minute spot onto the surface of a recording medium, and a photodetector that detects reflected light from this condensing point, the light source 1. An optical head device comprising means for blocking light in a central portion near the center of a cross section of a light beam emitted from the optical head, transmitting light in a peripheral portion thereof, and further blocking light in the peripheral portion.
JP63245063A 1988-06-14 1988-09-28 Optical head device Expired - Fee Related JP2586600B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP63245063A JP2586600B2 (en) 1988-09-28 1988-09-28 Optical head device
EP94120116A EP0646911A3 (en) 1988-06-14 1989-06-13 Optical head apparatus.
EP89110712A EP0346844B1 (en) 1988-06-14 1989-06-13 Optical head apparatus
DE68924303T DE68924303T2 (en) 1988-06-14 1989-06-13 Optical head arrangement.
US07/366,073 US5121378A (en) 1988-06-14 1989-06-14 Optical head apparatus for focussing a minute light beam spot on a recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63245063A JP2586600B2 (en) 1988-09-28 1988-09-28 Optical head device

Publications (2)

Publication Number Publication Date
JPH0291829A true JPH0291829A (en) 1990-03-30
JP2586600B2 JP2586600B2 (en) 1997-03-05

Family

ID=17128038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63245063A Expired - Fee Related JP2586600B2 (en) 1988-06-14 1988-09-28 Optical head device

Country Status (1)

Country Link
JP (1) JP2586600B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528524A (en) * 1991-07-22 1993-02-05 Nec Corp Optical head device
JPH06119653A (en) * 1992-10-07 1994-04-28 Nec Corp Optical head device
JPH06215408A (en) * 1992-09-09 1994-08-05 Nec Corp Laser aligner
JPH07192304A (en) * 1993-12-28 1995-07-28 Nec Corp Optical head device
US5689493A (en) * 1996-04-01 1997-11-18 Nec Corporation A super-resolution optical head with signal corrective circuit
US7154837B2 (en) * 2000-05-31 2006-12-26 Matsushita Electric Industrial Co., Ltd. Optical pickup and optical information recording/reproducing device
JP2013148819A (en) * 2012-01-23 2013-08-01 Fujifilm Corp Exposure optical system, exposure device and exposure method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347804A (en) * 1976-10-12 1978-04-28 Mitsubishi Electric Corp Optical reproducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347804A (en) * 1976-10-12 1978-04-28 Mitsubishi Electric Corp Optical reproducer

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528524A (en) * 1991-07-22 1993-02-05 Nec Corp Optical head device
JPH06215408A (en) * 1992-09-09 1994-08-05 Nec Corp Laser aligner
JPH06119653A (en) * 1992-10-07 1994-04-28 Nec Corp Optical head device
JPH07192304A (en) * 1993-12-28 1995-07-28 Nec Corp Optical head device
US5689493A (en) * 1996-04-01 1997-11-18 Nec Corporation A super-resolution optical head with signal corrective circuit
US7154837B2 (en) * 2000-05-31 2006-12-26 Matsushita Electric Industrial Co., Ltd. Optical pickup and optical information recording/reproducing device
JP2013148819A (en) * 2012-01-23 2013-08-01 Fujifilm Corp Exposure optical system, exposure device and exposure method
WO2013111499A1 (en) * 2012-01-23 2013-08-01 富士フイルム株式会社 Exposure optical system, exposure apparatus, and exposure method
CN104067177A (en) * 2012-01-23 2014-09-24 株式会社阿迪泰克工程 Exposure optical system, exposure apparatus, and exposure method
CN104067177B (en) * 2012-01-23 2016-05-04 株式会社阿迪泰克工程 Exposure optical system, exposure device and exposure method

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