JPH0291336U - - Google Patents
Info
- Publication number
- JPH0291336U JPH0291336U JP17070488U JP17070488U JPH0291336U JP H0291336 U JPH0291336 U JP H0291336U JP 17070488 U JP17070488 U JP 17070488U JP 17070488 U JP17070488 U JP 17070488U JP H0291336 U JPH0291336 U JP H0291336U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holder
- vapor phase
- phase growth
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17070488U JPH0291336U (it) | 1988-12-29 | 1988-12-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17070488U JPH0291336U (it) | 1988-12-29 | 1988-12-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0291336U true JPH0291336U (it) | 1990-07-19 |
Family
ID=31461881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17070488U Pending JPH0291336U (it) | 1988-12-29 | 1988-12-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0291336U (it) |
-
1988
- 1988-12-29 JP JP17070488U patent/JPH0291336U/ja active Pending