JPH0290844U - - Google Patents
Info
- Publication number
- JPH0290844U JPH0290844U JP17020888U JP17020888U JPH0290844U JP H0290844 U JPH0290844 U JP H0290844U JP 17020888 U JP17020888 U JP 17020888U JP 17020888 U JP17020888 U JP 17020888U JP H0290844 U JPH0290844 U JP H0290844U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- tank
- cup
- sub
- liquid sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170208U JPH058606Y2 (hu) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170208U JPH058606Y2 (hu) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290844U true JPH0290844U (hu) | 1990-07-18 |
| JPH058606Y2 JPH058606Y2 (hu) | 1993-03-03 |
Family
ID=31460954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988170208U Expired - Lifetime JPH058606Y2 (hu) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058606Y2 (hu) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119532A (ja) * | 1986-11-07 | 1988-05-24 | Mitsubishi Electric Corp | 半導体製造におけるフオトレジスト塗布および現像装置 |
| JPS63152123A (ja) * | 1986-12-17 | 1988-06-24 | Tokyo Electron Ltd | 浸漬式の液処理装置 |
-
1988
- 1988-12-30 JP JP1988170208U patent/JPH058606Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119532A (ja) * | 1986-11-07 | 1988-05-24 | Mitsubishi Electric Corp | 半導体製造におけるフオトレジスト塗布および現像装置 |
| JPS63152123A (ja) * | 1986-12-17 | 1988-06-24 | Tokyo Electron Ltd | 浸漬式の液処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058606Y2 (hu) | 1993-03-03 |