JPH0290823U - - Google Patents
Info
- Publication number
- JPH0290823U JPH0290823U JP17158688U JP17158688U JPH0290823U JP H0290823 U JPH0290823 U JP H0290823U JP 17158688 U JP17158688 U JP 17158688U JP 17158688 U JP17158688 U JP 17158688U JP H0290823 U JPH0290823 U JP H0290823U
- Authority
- JP
- Japan
- Prior art keywords
- air
- base
- carrier
- intake port
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 1
Landscapes
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17158688U JPH0290823U (ko) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17158688U JPH0290823U (ko) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290823U true JPH0290823U (ko) | 1990-07-18 |
Family
ID=31463548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17158688U Pending JPH0290823U (ko) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290823U (ko) |
-
1988
- 1988-12-28 JP JP17158688U patent/JPH0290823U/ja active Pending