JPH0290664U - - Google Patents

Info

Publication number

JPH0290664U

JPH0290664U JP16922388U JP16922388U JPH0290664U JP H0290664 U JPH0290664 U JP H0290664U JP 16922388 U JP16922388 U JP 16922388U JP 16922388 U JP16922388 U JP 16922388U JP H0290664 U JPH0290664 U JP H0290664U

Authority

JP

Japan

Prior art keywords

cathode

sample

thin film

forming apparatus

holder

Prior art date

1988-12-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 6
• 239000002184 metal Substances 0.000 claims description 3
• 229910021645 metal ion Inorganic materials 0.000 claims 2
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 238000000151 deposition Methods 0.000 claims 1
• 238000010891 electric arc Methods 0.000 claims 1
• 230000008020 evaporation Effects 0.000 claims 1
• 238000001704 evaporation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000000034 method Methods 0.000 description 1