JPH0290045U - - Google Patents
Info
- Publication number
- JPH0290045U JPH0290045U JP16975988U JP16975988U JPH0290045U JP H0290045 U JPH0290045 U JP H0290045U JP 16975988 U JP16975988 U JP 16975988U JP 16975988 U JP16975988 U JP 16975988U JP H0290045 U JPH0290045 U JP H0290045U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- handpiece
- spherical body
- polishing
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16975988U JPH0290045U (es) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16975988U JPH0290045U (es) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290045U true JPH0290045U (es) | 1990-07-17 |
Family
ID=31460102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16975988U Pending JPH0290045U (es) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290045U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08277469A (ja) * | 1995-04-06 | 1996-10-22 | Japan Energy Corp | ウエハークランプ装置の再生方法 |
-
1988
- 1988-12-28 JP JP16975988U patent/JPH0290045U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08277469A (ja) * | 1995-04-06 | 1996-10-22 | Japan Energy Corp | ウエハークランプ装置の再生方法 |