JPH0289827U - - Google Patents

Info

Publication number
JPH0289827U
JPH0289827U JP16950988U JP16950988U JPH0289827U JP H0289827 U JPH0289827 U JP H0289827U JP 16950988 U JP16950988 U JP 16950988U JP 16950988 U JP16950988 U JP 16950988U JP H0289827 U JPH0289827 U JP H0289827U
Authority
JP
Japan
Prior art keywords
quartz boat
shaft
boat
furnace
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16950988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16950988U priority Critical patent/JPH0289827U/ja
Publication of JPH0289827U publication Critical patent/JPH0289827U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP16950988U 1988-12-28 1988-12-28 Pending JPH0289827U (US20100154137A1-20100624-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16950988U JPH0289827U (US20100154137A1-20100624-C00004.png) 1988-12-28 1988-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16950988U JPH0289827U (US20100154137A1-20100624-C00004.png) 1988-12-28 1988-12-28

Publications (1)

Publication Number Publication Date
JPH0289827U true JPH0289827U (US20100154137A1-20100624-C00004.png) 1990-07-17

Family

ID=31459634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16950988U Pending JPH0289827U (US20100154137A1-20100624-C00004.png) 1988-12-28 1988-12-28

Country Status (1)

Country Link
JP (1) JPH0289827U (US20100154137A1-20100624-C00004.png)

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