JPH0289648A - Ink-jet recording head - Google Patents

Ink-jet recording head

Info

Publication number
JPH0289648A
JPH0289648A JP24195588A JP24195588A JPH0289648A JP H0289648 A JPH0289648 A JP H0289648A JP 24195588 A JP24195588 A JP 24195588A JP 24195588 A JP24195588 A JP 24195588A JP H0289648 A JPH0289648 A JP H0289648A
Authority
JP
Japan
Prior art keywords
ink
recording head
pressurizing chamber
discharge
ink supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24195588A
Other languages
Japanese (ja)
Inventor
Naoto Fukazawa
直人 深沢
Kazuhiko Nagayama
永山 一彦
Kosuke Sasaki
佐々木 光祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24195588A priority Critical patent/JPH0289648A/en
Publication of JPH0289648A publication Critical patent/JPH0289648A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/055Devices for absorbing or preventing back-pressure

Abstract

PURPOSE:To reduce the return of ink to the ink feed side, and to stabilize the discharge of ink by partially throttling the width of an ink feed in the vicinity of the inlet of an ink pressure chamber and constituting an ink backflow preventive section. CONSTITUTION:Sections near the inlets of ink pressure chambers 2 in ink feeds 2 on a substrate 1 are throttled in the width direction, thus organizing backflow preventive sections 2a. When such backflow preventive sections 2a are mounted, no only passage resistance but also inertial resistance by the mass of ink can be balanced before and behind the ink pressure chambers 3 because the passage resistance on the ink supply side is adjusted easily, and the quantity of ink escaping to the ink supply side and the quantities of ink ejected from ink nozzles 5 are balanced when a piezoelectric element 10 is driven, thus stabilizing the discharge of ink. According to the backflow preventive sections 2a, the movement of ink in the direction of the nozzles and the movement of ink to the ink supply side are equilibrated, thus simultaneously satisfying the increase of discharge efficiency and the shortening of the ink return time after discharge.

Description

【発明の詳細な説明】[Detailed description of the invention] 【産業上の利用分野】[Industrial application field]

この発明はオン・デマンド型インクジェット記録ヘッド
に関し、特にインク噴射時のインクの逆流を防止する手
段に関する。
The present invention relates to an on-demand inkjet recording head, and more particularly to means for preventing backflow of ink during ink ejection.

【従来の技術】[Conventional technology]

インクジェット記録ヘッドは、微細なノズル孔からイン
クを噴射し、紙などの記録媒体上にインクを付着させて
記録を行うものであるが、その一つとして、従来、オン
・デマンド型インクジェット記録ヘッドが知られている
。 第3図及び第4図はその一般的な構成を示すもので、第
3図はインク流路の配列を示す平面図、第4図は紹断面
図である。図のインクジェット記録ヘッドは、インク供
給路11、インク加圧室12、インク噴射通路13及び
インクノズル14からなる多数のインク流路と、これら
に共通のインク溜15とが溝状に形成された基板16に
、振動板17が積層、一体化され、さらに振動板17の
インク加圧室12に対応する位置に電気機械変換素子と
しての圧電素子18が貼着されて構成されている。 このような構造において、圧電素子18に電気信号が印
加されると、振動板17がインク加圧室12の内側に変
位し、インク加圧室12の容積を急激に減少させる。そ
の結果、減少した容積分のインクがインクノズル14か
らインク滴となって噴射され、それが図示しない記録媒
体に点着して印字が行われる。
An inkjet recording head performs recording by ejecting ink from minute nozzle holes and depositing the ink on a recording medium such as paper. Conventionally, an on-demand type inkjet recording head Are known. 3 and 4 show its general configuration, with FIG. 3 being a plan view showing the arrangement of the ink channels, and FIG. 4 being a cross-sectional view. In the inkjet recording head shown in the figure, a large number of ink flow paths consisting of an ink supply path 11, an ink pressurizing chamber 12, an ink ejection path 13, and an ink nozzle 14, and an ink reservoir 15 common to these are formed in the shape of a groove. A diaphragm 17 is laminated and integrated with a substrate 16, and a piezoelectric element 18 as an electromechanical transducer is adhered to a position of the diaphragm 17 corresponding to the ink pressurizing chamber 12. In such a structure, when an electric signal is applied to the piezoelectric element 18, the diaphragm 17 is displaced inside the ink pressurizing chamber 12, and the volume of the ink pressurizing chamber 12 is rapidly reduced. As a result, the reduced volume of ink is ejected from the ink nozzle 14 in the form of ink droplets, which are spotted on a recording medium (not shown) to perform printing.

【発明が解決しようとする課題】[Problem to be solved by the invention]

ところで、このよ・うなインクジェット記録ヘッドにお
いて、圧電素子18に電気信号が印加され、インク加圧
室12に急激なパルス状の容積変化が与えられると、イ
ンク加圧室12内のインクはインク滴としてインクノズ
ル14から吐出される一方、後方のインク供給路11の
方向にも押し戻される。 ところが、インクが逆流すると、他のインクノズルから
インク滴が吐出される恐れがある。そこで、インク供給
路11を広く深く形成してインクの逆流パルスを吸収し
ようとすると、インク加圧室12の後方の流路抵抗が小
さくなって、インクノズル14側から吐出されるインク
よりも後方へ逆流するインクの量が多くなり、インク吐
出の低下を招く。また、このことは圧電素子の変形をよ
り大きくする必要を生じ、これはまた、圧電素子の大型
化によるインクノズルの微小化、高集積化の阻害、圧電
素子への印加電圧の増加による素子の劣化につながるこ
ととなる。 この発明は、インク供給路側へのインクの戻りを残らし
てインク吐出を安定させたインクシエンド記録ヘッドを
提供することを目的とするものである。
By the way, in such an inkjet recording head, when an electric signal is applied to the piezoelectric element 18 and a rapid pulse-like volume change is given to the ink pressurizing chamber 12, the ink in the ink pressurizing chamber 12 becomes an ink droplet. While the ink is ejected from the ink nozzle 14, it is also pushed back toward the rear ink supply path 11. However, if the ink flows backward, there is a risk that ink droplets will be ejected from other ink nozzles. Therefore, if an attempt is made to form the ink supply path 11 wide and deep to absorb the ink backflow pulse, the flow path resistance at the rear of the ink pressurizing chamber 12 becomes smaller, and the flow path resistance at the rear of the ink pressurizing chamber 12 decreases. The amount of ink flowing back to the printer increases, resulting in a decrease in ink ejection. In addition, this makes it necessary to increase the deformation of the piezoelectric element, and this also impedes the miniaturization of ink nozzles and high integration due to the increase in the size of the piezoelectric element, and the increase in the voltage applied to the piezoelectric element. This will lead to deterioration. SUMMARY OF THE INVENTION An object of the present invention is to provide an ink side recording head that stabilizes ink ejection by leaving ink returning to the ink supply path side.

【課題を解決するための手段】[Means to solve the problem]

上記目的を達成するために、この発明は、基板上に、イ
ンク供給路、インク加圧室、インク噴射通路及びインク
ノズルからなるインク流路が溝状に多数形成されたイン
クジェット記録ヘッドにおいて、インク加圧室の入口近
傍でインク供給路の幅を部分的に絞ることによりインク
逆流防止部分を構成するものとする。
In order to achieve the above object, the present invention provides an inkjet recording head in which a plurality of groove-shaped ink flow paths each consisting of an ink supply path, an ink pressure chamber, an ink ejection path, and an ink nozzle are formed on a substrate. The ink backflow prevention portion is configured by partially narrowing the width of the ink supply path near the entrance of the pressurizing chamber.

【作 用】[For use]

インク加圧室の入口近傍でインク供給路の幅を部分的に
絞ってインク逆流防止部分を構成することにより、イン
ク供給路側の流路抵抗が上がってインクの戻りが減り、
他のインクノズルへの影古が小さくなるとともに、イン
クの戻りが減った分、結果としてインクノズル側へのイ
ンクの移動量が増え、同量のインクを吐出させるための
圧電素子の変位を小さくできる。
By partially narrowing the width of the ink supply path near the inlet of the ink pressurizing chamber to form an ink backflow prevention section, the flow path resistance on the ink supply path side is increased and ink return is reduced.
As the impact on other ink nozzles becomes smaller and the amount of ink returned is reduced, the amount of ink transferred to the ink nozzle side increases, reducing the displacement of the piezoelectric element to eject the same amount of ink. can.

【実施例】【Example】

第1図及び第2図はこの発明の実施例を示し、第1図は
インク流路の配列・を示す平面図、第2図は第1図の■
−Hに沿う断面図である。 第1図及び第2図において、ガラスからなる基板l上に
は、インク供給路2、インク加圧室3、インク噴射通路
4及びインクノズル5からなる多数のインク流路と、こ
れらに共通のインク溜6とがフォトエツチングにより溝
状に多数形成されている。また、インク供給路2とイン
ク溜6とを連結する部分にインクノズル5とほぼ同一の
幅、深さのフィルタ流路7が設けられ、さらにインク加
圧室3の入口と出口に、インクの流れを円滑にするため
と、後記する振動板のだれ込みを防止するために、一対
の島状突起8が設けられている。この基板1には振動板
9が接着により接合され、さらにこの振動板9のインク
加圧室3に対応する位置に、圧電素子10が接着により
貼着されている。 このようなインクジェット記録ヘッドにおいて、インク
供給路2におけるインク加圧室3の入口近傍部分は幅が
絞り込まれて、逆流防止部分2aを構成している。図示
実施例の場合、逆流防止部2aの幅は0.1mm、長さ
を1〜2m+++とじである。そして、インク供給路2
は、幅を0.5〜0 、9 mm、長さを3〜5 mm
とした。ここで、逆流防止部2aの長さ、あるいはイン
ク供給路2の幅や長さは、各流路におけるインク加圧室
3から先のインク噴射側の流路抵抗に応じて流路ごとに
差を設けである。 これにより、インク加圧室3前後の流路抵抗の比が全流
路で一定し、各ノズルについて均一なインク滴の噴射が
得られる。 また、第1図に示すように、インク供給路2及びインク
加圧室3と逆流防止部2aとの連結部2b及び3aはテ
ーパ状にしであるが、連結部2bは開きを小さく、また
3aは開きを大きくして、インク加圧室3からインク供
給路2側へはインクが流れにくいが、インク供給路2側
からインク加圧室3側へはインクを流れ易くし、良好な
吐出特性を得るようにしている。 なお、インク供給路2の幅を絞らず部分的に深さを浅く
することによっても流路抵抗を上げることができるが、
エツチングなどでその加工を行う場合、深さの制御は難
しぐ精度に問題が生じる上、加工の過程でマスキングテ
ープを貼り付けるなど工程が複雑になって手間が増える
ため好ましくない このように逆流防止部2aを設けると、インク供給側(
インク加圧室3の手前側)の流路抵抗の調整が容易とな
るため、流路抵抗のみならずインクのfffiによる慣
性抵抗についてもインク加圧室3の前後で均衡をとるこ
とができ、圧電素子10を駆動した際にインク供給側へ
逃げるインクの量とインクノズル5から噴出する量とを
バランスさせてインク吐出を安定させることができる。 インク供給側の抵抗は大きいほど吐出効率が増すが、吐
出後のインク供給はインクノズル5でのインクの表面張
力によりインクメニスカスがノズル端面まで戻る作用に
よって行われるため、インク供給側の抵抗が大きすぎる
と、インク戻り時間の増加を招き、インク吐出の繰り返
し周期が長くなる。しかし、インク加圧室3の手前を狭
くした逆流防止部分2aによれば、ノズル方向へのイン
ク移動量とインク供給側へのインク移動量とを均衡させ
られるので、吐出効率の増大と吐出後のインク戻り時間
の短縮とを同時に満足させることができる。 ここで、逆流防止部分2aをインク加圧室3の直ぐ手前
に作り、かつ細く絞られた部分を挟んで両側をテーパ状
に広げ、その際、インク加圧室3側の開きをインク供給
路2側の開きよりも大きくすることにより、吐出後にイ
ンクがインク供給側からインク加圧室3に戻る時間にあ
まり影響を与えないで、インク吐出時のインクの逆流を
より効果的に抑えることができる。そして、インク供給
路2の幅はホトマスクの幅で決定できるので、すでに述
べたように、エツチングによって深さを調整するよりも
精度、工数などの点で有利である。
1 and 2 show an embodiment of the present invention, FIG. 1 is a plan view showing the arrangement of ink flow paths, and FIG.
It is a sectional view along -H. In FIGS. 1 and 2, on a substrate l made of glass, there are a number of ink flow paths consisting of an ink supply path 2, an ink pressurizing chamber 3, an ink ejection path 4, and an ink nozzle 5, and a common ink flow path for these. A large number of ink reservoirs 6 are formed in the shape of grooves by photo-etching. In addition, a filter flow path 7 having approximately the same width and depth as the ink nozzle 5 is provided at a portion connecting the ink supply path 2 and the ink reservoir 6, and a filter flow path 7 having approximately the same width and depth as the ink nozzle 5 is provided at an inlet and an outlet of the ink pressurizing chamber 3. A pair of island-shaped protrusions 8 are provided to smooth the flow and to prevent the diaphragm from sagging as described later. A diaphragm 9 is bonded to the substrate 1 by adhesive, and a piezoelectric element 10 is further bonded to the diaphragm 9 at a position corresponding to the ink pressurizing chamber 3. In such an inkjet recording head, a portion of the ink supply path 2 near the inlet of the ink pressurizing chamber 3 is narrowed in width to constitute a backflow prevention portion 2a. In the illustrated embodiment, the width of the backflow prevention portion 2a is 0.1 mm, and the length is 1 to 2 m+++. Then, the ink supply path 2
The width is 0.5 to 0.9 mm, and the length is 3 to 5 mm.
And so. Here, the length of the backflow prevention part 2a or the width and length of the ink supply path 2 are different for each flow path depending on the flow path resistance on the ink ejection side from the ink pressurizing chamber 3 in each flow path. This is provided. As a result, the ratio of the flow path resistances before and after the ink pressurizing chamber 3 is constant throughout the entire flow path, and uniform ink droplets can be ejected from each nozzle. Further, as shown in FIG. 1, the connecting portions 2b and 3a between the ink supply path 2, the ink pressurizing chamber 3, and the backflow prevention portion 2a are tapered, but the connecting portion 2b has a small opening, and the connecting portion 3a has a small opening. By widening the opening, it is difficult for ink to flow from the ink pressure chamber 3 to the ink supply path 2 side, but it is easy to flow from the ink supply path 2 side to the ink pressure chamber 3 side, resulting in good ejection characteristics. I'm trying to get it. Note that the flow path resistance can also be increased by partially reducing the depth of the ink supply path 2 without narrowing the width.
If such processing is performed by etching, it is difficult to control the depth, causing problems with accuracy, and the process becomes complicated and labor-intensive, such as applying masking tape during the processing process, which is undesirable. When the section 2a is provided, the ink supply side (
Since it is easy to adjust the flow path resistance (on the front side of the ink pressurizing chamber 3), not only the flow path resistance but also the inertial resistance due to the ink fffi can be balanced before and after the ink pressurizing chamber 3. When the piezoelectric element 10 is driven, the amount of ink escaping to the ink supply side and the amount ejected from the ink nozzle 5 can be balanced to stabilize ink ejection. The greater the resistance on the ink supply side, the higher the ejection efficiency, but since the ink supply after ejection is performed by the action of the ink meniscus returning to the nozzle end surface due to the surface tension of the ink in the ink nozzle 5, the resistance on the ink supply side is large. If it is too long, the ink return time will increase, and the repetition cycle of ink ejection will become longer. However, according to the backflow prevention portion 2a that is narrowed in front of the ink pressurizing chamber 3, the amount of ink movement toward the nozzle and the amount of ink movement toward the ink supply side can be balanced, so that the ejection efficiency can be increased and At the same time, the ink return time can be shortened. Here, the backflow prevention part 2a is created immediately in front of the ink pressurizing chamber 3, and both sides are widened into a tapered shape with the narrowed part in between. At this time, the opening on the ink pressurizing chamber 3 side is used as the ink supply path By making the opening larger than the opening on the second side, backflow of ink during ink ejection can be more effectively suppressed without greatly affecting the time for the ink to return from the ink supply side to the ink pressurizing chamber 3 after ejection. can. Since the width of the ink supply path 2 can be determined by the width of the photomask, this method is more advantageous in terms of precision and man-hours than adjusting the depth by etching, as described above.

【発明の効果】【Effect of the invention】

この発明によれば、インク加圧室の入口近傍でインク供
給路の幅を部分的に絞ってインク逆流防止部分を構成し
、インク供給側へのインクの戻りを減らすことにより、
インク吐出時の他のインクノズルへの影響を減らして・
インク吐出を安定させることができ、またインクの吐出
効率を向上させて、圧電素子の小型化によるインクノズ
ルの高密度化、印加電圧の低下による圧電素子の劣化防
止を図ることができる。
According to this invention, the width of the ink supply path is partially narrowed near the inlet of the ink pressurizing chamber to form an ink backflow prevention portion, thereby reducing the return of ink to the ink supply side.
Reduces the impact on other ink nozzles when ejecting ink.
Ink ejection can be stabilized, ink ejection efficiency can be improved, ink nozzle density can be increased by miniaturizing the piezoelectric element, and deterioration of the piezoelectric element due to a decrease in applied voltage can be prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の実施例のインク流路の配列を示す平
面図、第2図は第1図のII−IIに沿う断面図、第3
図は従来例のインク流路の配列を示す平面図、第4図は
第1図の縦断面図である。 ■・・・基板、2・・・インク供給路、2a・・・逆流
防止部分、3・・・インク加圧室、4・・・インク噴射
通路、5・・・インクノズル、9・・・振動板、10・
・・圧電素子。 第1図 第2図
FIG. 1 is a plan view showing the arrangement of ink flow paths in an embodiment of the present invention, FIG. 2 is a sectional view taken along II-II in FIG. 1, and FIG.
This figure is a plan view showing the arrangement of ink flow paths in a conventional example, and FIG. 4 is a longitudinal sectional view of FIG. 1. ■...Substrate, 2...Ink supply path, 2a...Backflow prevention portion, 3...Ink pressurizing chamber, 4...Ink ejection passage, 5...Ink nozzle, 9... Vibration plate, 10・
··Piezoelectric element. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1)基板上に、インク供給路、インク加圧室、インク噴
射通路及びインクノズルからなるインク流路が溝状に多
数形成されたインクジェット記録ヘッドにおいて、イン
ク加圧室の入口近傍でインク供給路の幅を部分的に絞る
ことによりインク逆流防止部分を構成したことを特徴と
するインクジェット記録ヘッド。
1) In an inkjet recording head in which a plurality of ink flow paths each consisting of an ink supply path, an ink pressure chamber, an ink ejection path, and an ink nozzle are formed in a groove shape on a substrate, the ink supply path is formed near the entrance of the ink pressure chamber. An inkjet recording head characterized in that an ink backflow prevention portion is formed by partially narrowing the width of the inkjet recording head.
JP24195588A 1988-09-27 1988-09-27 Ink-jet recording head Pending JPH0289648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24195588A JPH0289648A (en) 1988-09-27 1988-09-27 Ink-jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24195588A JPH0289648A (en) 1988-09-27 1988-09-27 Ink-jet recording head

Publications (1)

Publication Number Publication Date
JPH0289648A true JPH0289648A (en) 1990-03-29

Family

ID=17082059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24195588A Pending JPH0289648A (en) 1988-09-27 1988-09-27 Ink-jet recording head

Country Status (1)

Country Link
JP (1) JPH0289648A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001328281A (en) * 2000-05-22 2001-11-27 Seiko Epson Corp Recording head unit, and its recovery mechanism
US6557985B2 (en) 1999-01-29 2003-05-06 Seiko Epson Corporation Ink jet recording head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6557985B2 (en) 1999-01-29 2003-05-06 Seiko Epson Corporation Ink jet recording head
JP2001328281A (en) * 2000-05-22 2001-11-27 Seiko Epson Corp Recording head unit, and its recovery mechanism

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