JPH0288234U - - Google Patents
Info
- Publication number
- JPH0288234U JPH0288234U JP16684288U JP16684288U JPH0288234U JP H0288234 U JPH0288234 U JP H0288234U JP 16684288 U JP16684288 U JP 16684288U JP 16684288 U JP16684288 U JP 16684288U JP H0288234 U JPH0288234 U JP H0288234U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- sample stage
- inflow path
- attached
- inflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684288U JPH0288234U (de) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684288U JPH0288234U (de) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288234U true JPH0288234U (de) | 1990-07-12 |
Family
ID=31454591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16684288U Pending JPH0288234U (de) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288234U (de) |
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1988
- 1988-12-26 JP JP16684288U patent/JPH0288234U/ja active Pending