JPH0288233U - - Google Patents

Info

Publication number
JPH0288233U
JPH0288233U JP1988167394U JP16739488U JPH0288233U JP H0288233 U JPH0288233 U JP H0288233U JP 1988167394 U JP1988167394 U JP 1988167394U JP 16739488 U JP16739488 U JP 16739488U JP H0288233 U JPH0288233 U JP H0288233U
Authority
JP
Japan
Prior art keywords
susceptor
sub
main
susceptors
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988167394U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521871Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988167394U priority Critical patent/JPH0521871Y2/ja
Publication of JPH0288233U publication Critical patent/JPH0288233U/ja
Application granted granted Critical
Publication of JPH0521871Y2 publication Critical patent/JPH0521871Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988167394U 1988-12-23 1988-12-23 Expired - Lifetime JPH0521871Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988167394U JPH0521871Y2 (cg-RX-API-DMAC10.html) 1988-12-23 1988-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988167394U JPH0521871Y2 (cg-RX-API-DMAC10.html) 1988-12-23 1988-12-23

Publications (2)

Publication Number Publication Date
JPH0288233U true JPH0288233U (cg-RX-API-DMAC10.html) 1990-07-12
JPH0521871Y2 JPH0521871Y2 (cg-RX-API-DMAC10.html) 1993-06-04

Family

ID=31455648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988167394U Expired - Lifetime JPH0521871Y2 (cg-RX-API-DMAC10.html) 1988-12-23 1988-12-23

Country Status (1)

Country Link
JP (1) JPH0521871Y2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006013808A1 (ja) * 2004-08-06 2006-02-09 Hitachi Kokusai Electric Inc. 熱処理装置及び基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006013808A1 (ja) * 2004-08-06 2006-02-09 Hitachi Kokusai Electric Inc. 熱処理装置及び基板の製造方法

Also Published As

Publication number Publication date
JPH0521871Y2 (cg-RX-API-DMAC10.html) 1993-06-04

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