JPH0286127U - - Google Patents
Info
- Publication number
- JPH0286127U JPH0286127U JP16640488U JP16640488U JPH0286127U JP H0286127 U JPH0286127 U JP H0286127U JP 16640488 U JP16640488 U JP 16640488U JP 16640488 U JP16640488 U JP 16640488U JP H0286127 U JPH0286127 U JP H0286127U
- Authority
- JP
- Japan
- Prior art keywords
- controls
- cartridge tank
- electromagnetic valve
- amount
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16640488U JPH0286127U ( ) | 1988-12-22 | 1988-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16640488U JPH0286127U ( ) | 1988-12-22 | 1988-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0286127U true JPH0286127U ( ) | 1990-07-09 |
Family
ID=31453753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16640488U Pending JPH0286127U ( ) | 1988-12-22 | 1988-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0286127U ( ) |
-
1988
- 1988-12-22 JP JP16640488U patent/JPH0286127U/ja active Pending