JPH028541U - - Google Patents

Info

Publication number

JPH028541U

JPH028541U JP8490088U JP8490088U JPH028541U JP H028541 U JPH028541 U JP H028541U JP 8490088 U JP8490088 U JP 8490088U JP 8490088 U JP8490088 U JP 8490088U JP H028541 U JPH028541 U JP H028541U

Authority

JP

Japan

Prior art keywords

air

processing chamber

chamber

main body

workbench

Prior art date

1988-06-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000012423 maintenance Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 238000011045 prefiltration Methods 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)