JPH028539U - - Google Patents

Info

Publication number
JPH028539U
JPH028539U JP8442388U JP8442388U JPH028539U JP H028539 U JPH028539 U JP H028539U JP 8442388 U JP8442388 U JP 8442388U JP 8442388 U JP8442388 U JP 8442388U JP H028539 U JPH028539 U JP H028539U
Authority
JP
Japan
Prior art keywords
grounded electrode
workpiece
plasma processing
plasma
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8442388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8442388U priority Critical patent/JPH028539U/ja
Publication of JPH028539U publication Critical patent/JPH028539U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP8442388U 1988-06-28 1988-06-28 Pending JPH028539U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8442388U JPH028539U (enrdf_load_stackoverflow) 1988-06-28 1988-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8442388U JPH028539U (enrdf_load_stackoverflow) 1988-06-28 1988-06-28

Publications (1)

Publication Number Publication Date
JPH028539U true JPH028539U (enrdf_load_stackoverflow) 1990-01-19

Family

ID=31309112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8442388U Pending JPH028539U (enrdf_load_stackoverflow) 1988-06-28 1988-06-28

Country Status (1)

Country Link
JP (1) JPH028539U (enrdf_load_stackoverflow)

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