JPH028539U - - Google Patents
Info
- Publication number
- JPH028539U JPH028539U JP8442388U JP8442388U JPH028539U JP H028539 U JPH028539 U JP H028539U JP 8442388 U JP8442388 U JP 8442388U JP 8442388 U JP8442388 U JP 8442388U JP H028539 U JPH028539 U JP H028539U
- Authority
- JP
- Japan
- Prior art keywords
- grounded electrode
- workpiece
- plasma processing
- plasma
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8442388U JPH028539U (cs) | 1988-06-28 | 1988-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8442388U JPH028539U (cs) | 1988-06-28 | 1988-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028539U true JPH028539U (cs) | 1990-01-19 |
Family
ID=31309112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8442388U Pending JPH028539U (cs) | 1988-06-28 | 1988-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028539U (cs) |
-
1988
- 1988-06-28 JP JP8442388U patent/JPH028539U/ja active Pending