JPH0285372U - - Google Patents
Info
- Publication number
- JPH0285372U JPH0285372U JP16487788U JP16487788U JPH0285372U JP H0285372 U JPH0285372 U JP H0285372U JP 16487788 U JP16487788 U JP 16487788U JP 16487788 U JP16487788 U JP 16487788U JP H0285372 U JPH0285372 U JP H0285372U
- Authority
- JP
- Japan
- Prior art keywords
- temperature control
- jig
- semiconductor element
- detection section
- absence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案の実施例１を示す正面図、第２
図ａ，ｂは平面図、第３図は本考案の実施例２を
示す正面図、第４図は従来の温度制御治具を示す
正面図である。
１…治具ベース、２…治具壁、３，３ａ，３ｂ
，３ｃ，３ｄ…温度センサ、４…ヒータ、５…半
導体素子、６…素子有無検出部。
Figure 1 is a front view showing Embodiment 1 of the present invention, Figure 2 is a front view showing Example 1 of the present invention;
Figures a and b are plan views, Figure 3 is a front view showing a second embodiment of the present invention, and Figure 4 is a front view showing a conventional temperature control jig. 1...Jig base, 2...Jig wall, 3, 3a, 3b
, 3c, 3d...Temperature sensor, 4...Heater, 5...Semiconductor element, 6...Element presence/absence detection section.
Claims (1)
子の有無を検出する素子有無検出部と、該素子有
無検出部に連動して、治具本体又は治具本体内の
半導体素子に選択的に接触する温度センサとを有
することを特徴とする半導体素子の温度制御治具
。 In a temperature control jig for a semiconductor element, there is an element presence/absence detection section that detects the presence or absence of a semiconductor element, and a temperature control device that selectively contacts the jig body or the semiconductor element in the jig body in conjunction with the element presence/absence detection section. 1. A temperature control jig for a semiconductor device, comprising: a sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487788U JPH0285372U (en) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487788U JPH0285372U (en) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0285372U true JPH0285372U (en) | 1990-07-04 |
Family
ID=31450859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16487788U Pending JPH0285372U (en) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0285372U (en) |
-
1988
- 1988-12-20 JP JP16487788U patent/JPH0285372U/ja active Pending