JPH0284323U - - Google Patents

Info

Publication number
JPH0284323U
JPH0284323U JP16487388U JP16487388U JPH0284323U JP H0284323 U JPH0284323 U JP H0284323U JP 16487388 U JP16487388 U JP 16487388U JP 16487388 U JP16487388 U JP 16487388U JP H0284323 U JPH0284323 U JP H0284323U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
spacer
metal mask
wafer holder
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16487388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16487388U priority Critical patent/JPH0284323U/ja
Publication of JPH0284323U publication Critical patent/JPH0284323U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP16487388U 1988-12-20 1988-12-20 Pending JPH0284323U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16487388U JPH0284323U (US06373033-20020416-M00071.png) 1988-12-20 1988-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16487388U JPH0284323U (US06373033-20020416-M00071.png) 1988-12-20 1988-12-20

Publications (1)

Publication Number Publication Date
JPH0284323U true JPH0284323U (US06373033-20020416-M00071.png) 1990-06-29

Family

ID=31450851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16487388U Pending JPH0284323U (US06373033-20020416-M00071.png) 1988-12-20 1988-12-20

Country Status (1)

Country Link
JP (1) JPH0284323U (US06373033-20020416-M00071.png)

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