JPH0282769U - - Google Patents
Info
- Publication number
- JPH0282769U JPH0282769U JP16022288U JP16022288U JPH0282769U JP H0282769 U JPH0282769 U JP H0282769U JP 16022288 U JP16022288 U JP 16022288U JP 16022288 U JP16022288 U JP 16022288U JP H0282769 U JPH0282769 U JP H0282769U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- viewing window
- ion beam
- injection chamber
- chamber container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 239000007943 implant Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 244000144985 peep Species 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16022288U JPH0282769U (enExample) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16022288U JPH0282769U (enExample) | 1988-12-08 | 1988-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282769U true JPH0282769U (enExample) | 1990-06-26 |
Family
ID=31442099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16022288U Pending JPH0282769U (enExample) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282769U (enExample) |
-
1988
- 1988-12-08 JP JP16022288U patent/JPH0282769U/ja active Pending
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