JPH0282768U - - Google Patents
Info
- Publication number
- JPH0282768U JPH0282768U JP1780989U JP1780989U JPH0282768U JP H0282768 U JPH0282768 U JP H0282768U JP 1780989 U JP1780989 U JP 1780989U JP 1780989 U JP1780989 U JP 1780989U JP H0282768 U JPH0282768 U JP H0282768U
- Authority
- JP
- Japan
- Prior art keywords
- hollow cathode
- hollow
- body made
- ion plating
- hollow body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims 6
- 238000001704 evaporation Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 2
- 229910002804 graphite Inorganic materials 0.000 claims 2
- 239000010439 graphite Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1780989U JPH0282768U (enExample) | 1988-08-11 | 1989-02-20 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10535988 | 1988-08-11 | ||
| JP1780989U JPH0282768U (enExample) | 1988-08-11 | 1989-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282768U true JPH0282768U (enExample) | 1990-06-26 |
Family
ID=31717378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1780989U Pending JPH0282768U (enExample) | 1988-08-11 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282768U (enExample) |
-
1989
- 1989-02-20 JP JP1780989U patent/JPH0282768U/ja active Pending