JPH0282768U - - Google Patents

Info

Publication number
JPH0282768U
JPH0282768U JP1780989U JP1780989U JPH0282768U JP H0282768 U JPH0282768 U JP H0282768U JP 1780989 U JP1780989 U JP 1780989U JP 1780989 U JP1780989 U JP 1780989U JP H0282768 U JPH0282768 U JP H0282768U
Authority
JP
Japan
Prior art keywords
hollow cathode
hollow
body made
ion plating
hollow body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1780989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1780989U priority Critical patent/JPH0282768U/ja
Publication of JPH0282768U publication Critical patent/JPH0282768U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1780989U 1988-08-11 1989-02-20 Pending JPH0282768U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1780989U JPH0282768U (enrdf_load_html_response) 1988-08-11 1989-02-20

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10535988 1988-08-11
JP1780989U JPH0282768U (enrdf_load_html_response) 1988-08-11 1989-02-20

Publications (1)

Publication Number Publication Date
JPH0282768U true JPH0282768U (enrdf_load_html_response) 1990-06-26

Family

ID=31717378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1780989U Pending JPH0282768U (enrdf_load_html_response) 1988-08-11 1989-02-20

Country Status (1)

Country Link
JP (1) JPH0282768U (enrdf_load_html_response)

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