JPH0282492U - - Google Patents
Info
- Publication number
- JPH0282492U JPH0282492U JP15999888U JP15999888U JPH0282492U JP H0282492 U JPH0282492 U JP H0282492U JP 15999888 U JP15999888 U JP 15999888U JP 15999888 U JP15999888 U JP 15999888U JP H0282492 U JPH0282492 U JP H0282492U
- Authority
- JP
- Japan
- Prior art keywords
- support cylinder
- suction head
- suction
- vacuum pressure
- guide portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Specific Conveyance Elements (AREA)
Description
図面は本考案の実施例を示し、第１図はトレー
と基板間でのワーク移載の態様を示す平面図、第
２図はワーク移載装置を示す一部断面にした側面
図、第３図は第２吸着装置を示す縦断面図、第４
図は第２吸着装置の下部を示す正面図、第５図は
第２吸着装置とワーク台との関係を示す一部断面
にした正面図である。
１……トレー、２……基板、６……吸着受渡装
置、１１……第１吸着装置、２５……第２吸着装
置、５９……第３吸着装置、４０……吸着ヘツド
、４１……支持筒、４４……真空圧作用室、４６
……吸引孔、４９，５０……真空圧通路、５１…
…ガイド孔、５２……係合ロツド、Ｗ……ワーク
。
The drawings show an embodiment of the present invention, and FIG. 1 is a plan view showing the mode of workpiece transfer between the tray and the substrate, FIG. 2 is a partially sectional side view showing the workpiece transfer device, and FIG. The figure is a longitudinal sectional view showing the second adsorption device, and the fourth adsorption device.
The figure is a front view showing the lower part of the second suction device, and FIG. 5 is a partially sectional front view showing the relationship between the second suction device and the work table. DESCRIPTION OF SYMBOLS 1... Tray, 2... Substrate, 6... Suction delivery device, 11... First suction device, 25... Second suction device, 59... Third suction device, 40... Suction head, 41... Support tube, 44... Vacuum pressure chamber, 46
...Suction hole, 49, 50...Vacuum pressure passage, 51...
...Guide hole, 52...Engagement rod, W...Work.
Claims (1)
備えた吸着ヘツドが支持筒に進退可能に且つ付勢
手段にて前進方向に付勢されて嵌挿支持された吸
着装置において、 上記吸着ヘツドは支持筒に回転可能に支持され
ていて、 上記支持筒の内部に形成され、吸着ヘツドを後
退せしめるよう真空圧を作用させる真空圧作用室
と、 上記吸引孔と真空圧作用室とを連通する真空圧
通路と、 上記吸着ヘツドと支持筒との一方に設けられ、
支持筒の軸方向に対して傾斜して延びるガイド部
と、 上記吸着ヘツドと支持筒との他方に設けられ、
上記ガイド部に係合し、吸着ヘツドの進退により
ガイド部に沿つて移動して吸着ヘツドを支持筒に
対して回転せしめる係合部と、 を備えていることを特徴とするワーク吸着装置
。[Claims for Utility Model Registration] A suction device in which a suction head equipped with a suction hole that suctions a workpiece by the action of vacuum pressure is inserted into and supported by a support cylinder so that it can move forward and backward and is urged in the forward direction by a biasing means. In the apparatus, the suction head is rotatably supported by a support cylinder, and a vacuum pressure application chamber is formed inside the support cylinder and applies vacuum pressure to move the suction head backward; a vacuum pressure passage communicating with the action chamber, and provided in one of the suction head and the support cylinder,
a guide portion extending obliquely with respect to the axial direction of the support cylinder; provided on the other side of the suction head and the support cylinder;
A work suction device comprising: an engaging portion that engages with the guide portion and moves along the guide portion as the suction head advances and retreats, thereby rotating the suction head with respect to the support cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15999888U JPH0282492U (en) | 1988-12-09 | 1988-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15999888U JPH0282492U (en) | 1988-12-09 | 1988-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282492U true JPH0282492U (en) | 1990-06-26 |
Family
ID=31441697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15999888U Pending JPH0282492U (en) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282492U (en) |
-
1988
- 1988-12-09 JP JP15999888U patent/JPH0282492U/ja active Pending