JPH0282042U - - Google Patents

Info

Publication number
JPH0282042U
JPH0282042U JP16285888U JP16285888U JPH0282042U JP H0282042 U JPH0282042 U JP H0282042U JP 16285888 U JP16285888 U JP 16285888U JP 16285888 U JP16285888 U JP 16285888U JP H0282042 U JPH0282042 U JP H0282042U
Authority
JP
Japan
Prior art keywords
photomask
container
vent hole
storage container
case body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16285888U
Other languages
English (en)
Japanese (ja)
Other versions
JP2517936Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988162858U priority Critical patent/JP2517936Y2/ja
Publication of JPH0282042U publication Critical patent/JPH0282042U/ja
Application granted granted Critical
Publication of JP2517936Y2 publication Critical patent/JP2517936Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988162858U 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器 Expired - Lifetime JP2517936Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Publications (2)

Publication Number Publication Date
JPH0282042U true JPH0282042U (h) 1990-06-25
JP2517936Y2 JP2517936Y2 (ja) 1996-11-20

Family

ID=31447069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988162858U Expired - Lifetime JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Country Status (1)

Country Link
JP (1) JP2517936Y2 (h)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007091296A (ja) * 2005-09-29 2007-04-12 Hoya Corp マスクブランク収納容器、マスクブランクの収納方法及びマスクブランク収納体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290381U (h) * 1985-11-26 1987-06-09
JPS6334273U (h) * 1986-04-07 1988-03-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290381U (h) * 1985-11-26 1987-06-09
JPS6334273U (h) * 1986-04-07 1988-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007091296A (ja) * 2005-09-29 2007-04-12 Hoya Corp マスクブランク収納容器、マスクブランクの収納方法及びマスクブランク収納体

Also Published As

Publication number Publication date
JP2517936Y2 (ja) 1996-11-20

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