JPH0282039U - - Google Patents

Info

Publication number
JPH0282039U
JPH0282039U JP16192488U JP16192488U JPH0282039U JP H0282039 U JPH0282039 U JP H0282039U JP 16192488 U JP16192488 U JP 16192488U JP 16192488 U JP16192488 U JP 16192488U JP H0282039 U JPH0282039 U JP H0282039U
Authority
JP
Japan
Prior art keywords
wafer
tweezers
pair
moving
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16192488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16192488U priority Critical patent/JPH0282039U/ja
Publication of JPH0282039U publication Critical patent/JPH0282039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP16192488U 1988-12-13 1988-12-13 Pending JPH0282039U (US07541385-20090602-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16192488U JPH0282039U (US07541385-20090602-C00001.png) 1988-12-13 1988-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16192488U JPH0282039U (US07541385-20090602-C00001.png) 1988-12-13 1988-12-13

Publications (1)

Publication Number Publication Date
JPH0282039U true JPH0282039U (US07541385-20090602-C00001.png) 1990-06-25

Family

ID=31445287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16192488U Pending JPH0282039U (US07541385-20090602-C00001.png) 1988-12-13 1988-12-13

Country Status (1)

Country Link
JP (1) JPH0282039U (US07541385-20090602-C00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011073875A (ja) * 2009-10-02 2011-04-14 Sharp Corp 搬送方法
CN107557746A (zh) * 2016-07-01 2018-01-09 佳能特机株式会社 基板夹持装置、成膜装置及成膜方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011073875A (ja) * 2009-10-02 2011-04-14 Sharp Corp 搬送方法
CN107557746A (zh) * 2016-07-01 2018-01-09 佳能特机株式会社 基板夹持装置、成膜装置及成膜方法
KR20180003993A (ko) * 2016-07-01 2018-01-10 캐논 톡키 가부시키가이샤 기판 협지 장치, 성막 장치 및 성막 방법
JP2018003094A (ja) * 2016-07-01 2018-01-11 キヤノントッキ株式会社 基板挟持装置、成膜装置及び成膜方法
CN107557746B (zh) * 2016-07-01 2020-11-10 佳能特机株式会社 基板夹持装置、成膜装置及成膜方法

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