JPH0282033U - - Google Patents

Info

Publication number
JPH0282033U
JPH0282033U JP16129388U JP16129388U JPH0282033U JP H0282033 U JPH0282033 U JP H0282033U JP 16129388 U JP16129388 U JP 16129388U JP 16129388 U JP16129388 U JP 16129388U JP H0282033 U JPH0282033 U JP H0282033U
Authority
JP
Japan
Prior art keywords
wafer
wafer holding
plate
holding part
polishing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16129388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16129388U priority Critical patent/JPH0282033U/ja
Publication of JPH0282033U publication Critical patent/JPH0282033U/ja
Pending legal-status Critical Current

Links

JP16129388U 1988-12-14 1988-12-14 Pending JPH0282033U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16129388U JPH0282033U (US20100056889A1-20100304-C00004.png) 1988-12-14 1988-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16129388U JPH0282033U (US20100056889A1-20100304-C00004.png) 1988-12-14 1988-12-14

Publications (1)

Publication Number Publication Date
JPH0282033U true JPH0282033U (US20100056889A1-20100304-C00004.png) 1990-06-25

Family

ID=31444095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16129388U Pending JPH0282033U (US20100056889A1-20100304-C00004.png) 1988-12-14 1988-12-14

Country Status (1)

Country Link
JP (1) JPH0282033U (US20100056889A1-20100304-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS632655A (ja) * 1986-06-23 1988-01-07 Furukawa Electric Co Ltd:The ウエハ研磨用プレ−ト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS632655A (ja) * 1986-06-23 1988-01-07 Furukawa Electric Co Ltd:The ウエハ研磨用プレ−ト

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