JPH0282031U - - Google Patents

Info

Publication number

JPH0282031U

JPH0282031U JP16288788U JP16288788U JPH0282031U JP H0282031 U JPH0282031 U JP H0282031U JP 16288788 U JP16288788 U JP 16288788U JP 16288788 U JP16288788 U JP 16288788U JP H0282031 U JPH0282031 U JP H0282031U

Authority

JP

Japan

Prior art keywords

spout

chemical vapor

generation device

vapor phase

nozzle

Prior art date

1988-12-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000126 substance Substances 0.000 claims description 5
• 239000012808 vapor phase Substances 0.000 claims 3
• 239000012495 reaction gas Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (2)