JPH0282029U - - Google Patents
Info
- Publication number
- JPH0282029U JPH0282029U JP16253188U JP16253188U JPH0282029U JP H0282029 U JPH0282029 U JP H0282029U JP 16253188 U JP16253188 U JP 16253188U JP 16253188 U JP16253188 U JP 16253188U JP H0282029 U JPH0282029 U JP H0282029U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- rotating disk
- storage table
- passive portion
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16253188U JPH0282029U (es) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16253188U JPH0282029U (es) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282029U true JPH0282029U (es) | 1990-06-25 |
Family
ID=31446441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16253188U Pending JPH0282029U (es) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282029U (es) |
-
1988
- 1988-12-14 JP JP16253188U patent/JPH0282029U/ja active Pending
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