JPH0281660U - - Google Patents
Info
- Publication number
- JPH0281660U JPH0281660U JP15824488U JP15824488U JPH0281660U JP H0281660 U JPH0281660 U JP H0281660U JP 15824488 U JP15824488 U JP 15824488U JP 15824488 U JP15824488 U JP 15824488U JP H0281660 U JPH0281660 U JP H0281660U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- ultrasonic sprayer
- thin film
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000003595 mist Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Special Spraying Apparatus (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15824488U JPH0281660U (en, 2012) | 1988-12-05 | 1988-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15824488U JPH0281660U (en, 2012) | 1988-12-05 | 1988-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281660U true JPH0281660U (en, 2012) | 1990-06-25 |
Family
ID=31438395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15824488U Pending JPH0281660U (en, 2012) | 1988-12-05 | 1988-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281660U (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613885A (ja) * | 1984-06-18 | 1986-01-09 | Taiyo Yuden Co Ltd | 霧化薄膜作製方法 |
-
1988
- 1988-12-05 JP JP15824488U patent/JPH0281660U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613885A (ja) * | 1984-06-18 | 1986-01-09 | Taiyo Yuden Co Ltd | 霧化薄膜作製方法 |