JPH0281516U - - Google Patents
Info
- Publication number
- JPH0281516U JPH0281516U JP16056888U JP16056888U JPH0281516U JP H0281516 U JPH0281516 U JP H0281516U JP 16056888 U JP16056888 U JP 16056888U JP 16056888 U JP16056888 U JP 16056888U JP H0281516 U JPH0281516 U JP H0281516U
- Authority
- JP
- Japan
- Prior art keywords
- base
- movable
- movable base
- respect
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Positioning Apparatuses (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16056888U JPH0535373Y2 (zh) | 1988-12-09 | 1988-12-09 | |
| US07/431,171 US5022619A (en) | 1988-12-09 | 1989-10-26 | Positioning device of table for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16056888U JPH0535373Y2 (zh) | 1988-12-09 | 1988-12-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0281516U true JPH0281516U (zh) | 1990-06-22 |
| JPH0535373Y2 JPH0535373Y2 (zh) | 1993-09-08 |
Family
ID=31442745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16056888U Expired - Lifetime JPH0535373Y2 (zh) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0535373Y2 (zh) |
-
1988
- 1988-12-09 JP JP16056888U patent/JPH0535373Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0535373Y2 (zh) | 1993-09-08 |