JPH0281512U - - Google Patents
Info
- Publication number
- JPH0281512U JPH0281512U JP16156488U JP16156488U JPH0281512U JP H0281512 U JPH0281512 U JP H0281512U JP 16156488 U JP16156488 U JP 16156488U JP 16156488 U JP16156488 U JP 16156488U JP H0281512 U JPH0281512 U JP H0281512U
- Authority
- JP
- Japan
- Prior art keywords
- electro
- concave
- convex
- modulation element
- optic modulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Description
第１図乃至第３図は本考案に係る電気的光学変
調素子取付角調整装置の一実施例に係り、第１図
は電気光学変調素子取付角調整機構の分解斜視図
、第２図は組付状態での電気光学変調素子取付角
調整装置の縦断面図、第３図は電気光学変調素子
取付角調整装置の一部破断側面図である。第４図
は偏光を用いて試料表面の蒸着膜の厚さを測定す
る膜厚測定装置のブロツク図である。
図中、１０はレーザ、１２は偏光子、１４は電
気光学変調器、１４ａは振動子、１４ｂは電気光
学変調素子、１６は真空チヤンバ、１８は試料、
２０は検光子、２２は光検出器、２４はハウジン
グ、２６は凸板、２８は凹板、３０はベース、３
４Ａ，３４Ｂはフレーム、４２Ａ，４２Ｂは引張
コイルスプリング、４４Ａ，４４Ｂは支持枠、４
８Ａ，４８Ｂは調整ねじ。
1 to 3 relate to an embodiment of the electro-optic modulation element mounting angle adjustment device according to the present invention, FIG. 1 is an exploded perspective view of the electro-optic modulation element mounting angle adjustment mechanism, and FIG. 2 is an assembled FIG. 3 is a longitudinal sectional view of the electro-optic modulation element mounting angle adjustment device in the attached state, and FIG. 3 is a partially cutaway side view of the electro-optic modulation element mounting angle adjustment device. FIG. 4 is a block diagram of a film thickness measuring device that measures the thickness of a deposited film on a sample surface using polarized light. In the figure, 10 is a laser, 12 is a polarizer, 14 is an electro-optic modulator, 14a is a vibrator, 14b is an electro-optic modulator, 16 is a vacuum chamber, 18 is a sample,
20 is an analyzer, 22 is a photodetector, 24 is a housing, 26 is a convex plate, 28 is a concave plate, 30 is a base, 3
4A, 34B are frames, 42A, 42B are tension coil springs, 44A, 44B are support frames, 4
8A and 48B are adjustment screws.
Claims (1)
Ｃを中心とする円周面が形成された凸部材２６と
、 固定側に設けられ該凸部材が該円周面側におい
て嵌合される凹部材２８と、 該凸部材を該凹部材に対し斜めに押圧して該凸
部材を該凹部材に対し該円周の一方側および該円
周の他方側へ摺動させる調整ねじ４８Ａ，４８Ｂ
と、 を有することを特徴とする電気光学変調素子取付
角調整装置。[Claims for Utility Model Registration] A support member 24 that supports an electro-optic modulation element; a convex member 26 provided on the support member and having a circumferential surface centered on a desired light passing axis C of the element; , a concave member 28 provided on the stationary side and into which the convex member is fitted on the circumferential surface side; and a concave member 28 that presses the convex member diagonally against the concave member so that the convex member is aligned with the concave member in the circular direction. Adjustment screws 48A, 48B that slide to one side of the circumference and the other side of the circumference
An electro-optic modulation element mounting angle adjustment device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16156488U JPH0281512U (en) | 1988-12-13 | 1988-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16156488U JPH0281512U (en) | 1988-12-13 | 1988-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281512U true JPH0281512U (en) | 1990-06-22 |
Family
ID=31444615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16156488U Pending JPH0281512U (en) | 1988-12-13 | 1988-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281512U (en) |
-
1988
- 1988-12-13 JP JP16156488U patent/JPH0281512U/ja active Pending
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