JPH028138U - - Google Patents
Info
- Publication number
- JPH028138U JPH028138U JP8726088U JP8726088U JPH028138U JP H028138 U JPH028138 U JP H028138U JP 8726088 U JP8726088 U JP 8726088U JP 8726088 U JP8726088 U JP 8726088U JP H028138 U JPH028138 U JP H028138U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heater section
- wafer
- radiation
- lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8726088U JPH028138U (ru) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8726088U JPH028138U (ru) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028138U true JPH028138U (ru) | 1990-01-19 |
Family
ID=31311878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8726088U Pending JPH028138U (ru) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028138U (ru) |
-
1988
- 1988-06-29 JP JP8726088U patent/JPH028138U/ja active Pending