JPH028134U - - Google Patents
Info
- Publication number
- JPH028134U JPH028134U JP8626688U JP8626688U JPH028134U JP H028134 U JPH028134 U JP H028134U JP 8626688 U JP8626688 U JP 8626688U JP 8626688 U JP8626688 U JP 8626688U JP H028134 U JPH028134 U JP H028134U
- Authority
- JP
- Japan
- Prior art keywords
- processing head
- rotating table
- foreign matter
- semiconductor wafer
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Milling, Broaching, Filing, Reaming, And Others (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8626688U JPH028134U (ru) | 1988-06-28 | 1988-06-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8626688U JPH028134U (ru) | 1988-06-28 | 1988-06-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH028134U true JPH028134U (ru) | 1990-01-19 |
Family
ID=31310905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8626688U Pending JPH028134U (ru) | 1988-06-28 | 1988-06-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH028134U (ru) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61158138A (ja) * | 1984-12-28 | 1986-07-17 | Nec Kansai Ltd | ウエハ表面の突起物除去装置 |
-
1988
- 1988-06-28 JP JP8626688U patent/JPH028134U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61158138A (ja) * | 1984-12-28 | 1986-07-17 | Nec Kansai Ltd | ウエハ表面の突起物除去装置 |