JPH028134U - - Google Patents

Info

Publication number
JPH028134U
JPH028134U JP8626688U JP8626688U JPH028134U JP H028134 U JPH028134 U JP H028134U JP 8626688 U JP8626688 U JP 8626688U JP 8626688 U JP8626688 U JP 8626688U JP H028134 U JPH028134 U JP H028134U
Authority
JP
Japan
Prior art keywords
processing head
rotating table
foreign matter
semiconductor wafer
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8626688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8626688U priority Critical patent/JPH028134U/ja
Publication of JPH028134U publication Critical patent/JPH028134U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Milling, Broaching, Filing, Reaming, And Others (AREA)
JP8626688U 1988-06-28 1988-06-28 Pending JPH028134U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8626688U JPH028134U ( ) 1988-06-28 1988-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8626688U JPH028134U ( ) 1988-06-28 1988-06-28

Publications (1)

Publication Number Publication Date
JPH028134U true JPH028134U ( ) 1990-01-19

Family

ID=31310905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8626688U Pending JPH028134U ( ) 1988-06-28 1988-06-28

Country Status (1)

Country Link
JP (1) JPH028134U ( )

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158138A (ja) * 1984-12-28 1986-07-17 Nec Kansai Ltd ウエハ表面の突起物除去装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158138A (ja) * 1984-12-28 1986-07-17 Nec Kansai Ltd ウエハ表面の突起物除去装置

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