JPH028131U - - Google Patents

Info

Publication number
JPH028131U
JPH028131U JP8563488U JP8563488U JPH028131U JP H028131 U JPH028131 U JP H028131U JP 8563488 U JP8563488 U JP 8563488U JP 8563488 U JP8563488 U JP 8563488U JP H028131 U JPH028131 U JP H028131U
Authority
JP
Japan
Prior art keywords
chemical solution
tank
filter
discharge port
heat exchanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8563488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8563488U priority Critical patent/JPH028131U/ja
Publication of JPH028131U publication Critical patent/JPH028131U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP8563488U 1988-06-27 1988-06-27 Pending JPH028131U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8563488U JPH028131U (US06826419-20041130-M00005.png) 1988-06-27 1988-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8563488U JPH028131U (US06826419-20041130-M00005.png) 1988-06-27 1988-06-27

Publications (1)

Publication Number Publication Date
JPH028131U true JPH028131U (US06826419-20041130-M00005.png) 1990-01-19

Family

ID=31310287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8563488U Pending JPH028131U (US06826419-20041130-M00005.png) 1988-06-27 1988-06-27

Country Status (1)

Country Link
JP (1) JPH028131U (US06826419-20041130-M00005.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125017A (ja) * 1984-11-22 1986-06-12 Hitachi Tokyo Electronics Co Ltd 塗布装置
JPS61214520A (ja) * 1985-03-20 1986-09-24 Hitachi Ltd 塗布装置
JPS62279632A (ja) * 1986-05-28 1987-12-04 Nec Corp 半導体製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125017A (ja) * 1984-11-22 1986-06-12 Hitachi Tokyo Electronics Co Ltd 塗布装置
JPS61214520A (ja) * 1985-03-20 1986-09-24 Hitachi Ltd 塗布装置
JPS62279632A (ja) * 1986-05-28 1987-12-04 Nec Corp 半導体製造装置

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