JPH0280943A - Apparatus for measuring moisture of fragmentary aggregate - Google Patents

Apparatus for measuring moisture of fragmentary aggregate

Info

Publication number
JPH0280943A
JPH0280943A JP23282988A JP23282988A JPH0280943A JP H0280943 A JPH0280943 A JP H0280943A JP 23282988 A JP23282988 A JP 23282988A JP 23282988 A JP23282988 A JP 23282988A JP H0280943 A JPH0280943 A JP H0280943A
Authority
JP
Japan
Prior art keywords
microwave
sample
trough
moisture
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23282988A
Other languages
Japanese (ja)
Inventor
Toshiharu Matsushita
松下 年治
Motoshi Saito
斉藤 元志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Kiko Co Ltd
Original Assignee
Kawasaki Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Kiko Co Ltd filed Critical Kawasaki Kiko Co Ltd
Priority to JP23282988A priority Critical patent/JPH0280943A/en
Publication of JPH0280943A publication Critical patent/JPH0280943A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To enhance measuring accuracy by setting the feed direction of small piece aggregate by a trough to a predetermined direction. CONSTITUTION:A trough 7 composed of a material having microwave transmissivity is provided to a microwave propagation path due to opposed transmitting and receiving antenna 1, 2 and vibrated by a driving plate 14 moving reciprocally to feed a sample of a fragmentary aggregate such as tea leaves and the moisture of the sample is measured from the effect of the moisture contained in the sample on a microwave. The feed direction of the sample is almost parallel to the electric field direction of a microwave and the longitudinal direction of the sample is easy to align with the electric field direction and, therefore, the attenuation of a microwave due to the moisture of the specimen becomes large and the absorption of a substance other than moisture or a ratio of an error due to a steady wave is reduced to enhance moisture measuring accuracy.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、マイクロ波を利用して茶葉等の小片集合体
の含有水分量又は含水率を測定する装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for measuring the moisture content or moisture content of an aggregate of small pieces such as tea leaves using microwaves.

〔従来の技術〕[Conventional technology]

従来から、水分がマイクロ波に与える影響をなんらかの
形で測定し、試料の水分量、含水率を求める方法、装置
は多数発案されている。
Conventionally, many methods and devices have been proposed for measuring the influence of moisture on microwaves in some way to determine the moisture content and moisture content of a sample.

本出願人は、最近、例えば特願昭63−117087号
、特願昭63−130229号、特願昭63−1416
65号として出願した技術にみられるように、マイクロ
波の伝播路の途中に測定域となる部分をマイクロ波透過
率の高い素材で形成してなるトラフを配し、このトラフ
を振動して試料を搬送しつつ試料がマイクロ波に与える
影響(マイクロ波の減衰量)を測定し、もって試料の水
分量または含水率を求めるための装置を開発した。その
後、さらに研究を進めた結果、次のような改善箇所を発
見した。
The present applicant has recently applied for the
As seen in the technology filed as No. 65, a trough made of a material with high microwave transmittance is placed in the middle of the microwave propagation path to form the measurement area, and this trough is vibrated to measure the sample. We have developed a device that measures the influence of the sample on microwaves (microwave attenuation) while transporting the sample, and thereby determines the water content or moisture content of the sample. After further research, we discovered the following areas for improvement.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

トラフを振動させて茶菓等の小片集合体を輸送すると、
小片集合体が長細形状をしていればいるほど、輸送方向
に小片集合体の長手方向が揃う傾向がみられる。これは
、トラフの振動により輸送されている個々の小片を見る
と、これらはトラフ上を跳ねたり滑ったり転がったりし
て進んでいくが、この時に小片がトラフの壁や進行速度
の遅い他の小片に引っ掛かると、小片は小片の引っ掛か
った面がトラフの輸送方向にほぼ平行になるまで回転す
るためであると考えられる。実際の水分測定装置では、
サンプルを取り出して水分を測定することが多いが、サ
ンプル量は一般に少量なので、これを輸送するトラフの
幅は狭くせざるを得す、小片が壁に引っ掛かる割合は自
ずと高くなる。
When the trough is vibrated to transport a collection of small pieces such as tea and sweets,
The more elongated the small piece aggregate is, the more the longitudinal direction of the small piece aggregate tends to align with the transportation direction. This is because when we look at the individual small pieces being transported by the vibrations of the trough, they bounce, slide, and roll on the trough, but at this time, the small pieces move against the walls of the trough or other objects that move slowly. This is believed to be because when a small piece is caught, the small piece rotates until the surface on which the small piece is caught becomes approximately parallel to the transport direction of the trough. In an actual moisture measuring device,
Samples are often taken out to measure moisture content, but since the amount of sample is generally small, the width of the trough that transports it must be narrow, which naturally increases the chance of small pieces getting caught on the walls.

一方、小片集合体によるマイクロ波の吸収の度合は、小
片集合体の長手方向がマイクロ波の電界方向に揃ってい
る時に非常に大きくなることが実験の結果明らかになっ
た。
On the other hand, experiments have revealed that the degree of microwave absorption by a small piece aggregate becomes extremely large when the longitudinal direction of the small piece aggregate is aligned with the direction of the microwave electric field.

第4図、第5図は、電磁ホーンa、bを対向してマイク
ロ波の伝播路を形成し、この伝播路に直交するように伝
播路の中心を回転軸とする発砲スチロール性の回転皿C
を横断し、この回転icの中央上に5X5X3(Jの発
砲スチロール性の容器dを載面した実験装置である。発
砲スチロールはマイクロ波の透過性が非常に優れた素材
である。
Figures 4 and 5 show a rotating plate made of polystyrene foam with electromagnetic horns a and b facing each other to form a microwave propagation path, and with the center of the propagation path as the rotation axis perpendicular to this propagation path. C
This is an experimental device in which a 5x5x3 (J) Styrofoam container d is placed on the center of this rotating IC. Styrofoam is a material with excellent microwave permeability.

使用するマイクロ波は9.4Gtlzである。この容器
d内に総重量14.0g、ドライヘース含水率13%の
楕揉葉(精揉工程を終えたばかりの茶菓)をその長手方
向をそろえて詰め込み、回転皿Cを回転して、精揉葉の
長平方向がマイクロ波の電界方向に平行する場合と直交
する場合の双方の減衰量を測定する。第6図は、上記測
定を10回繰り返し得られた減衰量のデータを示すもの
であり、各数値の単位はmVであるが、数値はログアン
プ、増幅装置を通した後の値であるから、数値間の比較
のみに利用されたい。第7図は、第6図の結果をグラフ
にしたものであり、第7図から、精揉葉の長手方向が電
界方向と平行の場合と垂直の場合とでマイクロ波の減衰
量に大きな差が存在し、平行の場合に減衰の度合が著し
く高いことが統計的手法を用いるまでもなく明らかであ
る。この理論的説明は困難であるが、例えば、下記の論
文が援用できる。
The microwave used is 9.4 Gtlz. Oval rolled leaves (tea confectionery that has just finished the rolling process) with a total weight of 14.0 g and a dry haze moisture content of 13% are packed into this container d with their longitudinal directions aligned, and the rotary plate C is rotated to roll the rolled leaves. The attenuation amount is measured both when the longitudinal direction of is parallel to the microwave electric field direction and when it is perpendicular to the direction of the microwave electric field. Figure 6 shows the attenuation data obtained by repeating the above measurement 10 times.The unit of each value is mV, but the value is the value after passing through a log amplifier and amplification device. , should be used only for comparisons between numbers. Figure 7 is a graph of the results in Figure 6. From Figure 7, there is a large difference in the amount of microwave attenuation between when the longitudinal direction of the leaves is parallel to the electric field direction and when it is perpendicular to the electric field direction. exists, and it is clear without using statistical methods that the degree of attenuation is extremely high in the parallel case. Although this theoretical explanation is difficult, for example, the following paper can be cited.

’Bozorth and Chapin″Demag
netizing Factorsof Rods  
J、Apply、Phys、13,1942.PP、3
20−326 Jこの論文は、磁界中の磁性体に磁力線
が集中する度合を示したものであり、磁性体の形状が磁
界の方向に細長くなればなるほど磁力線の集中度が強(
なる傾向があることを示している。磁界を電界に、磁性
体を誘電体に、磁力線を電気力線に対応すれば、上述の
実験結果は説明できると思われる。
'Bozorth and Chapin'Demag
Netizing Factors of Rods
J. Apply, Phys., 13, 1942. PP, 3
20-326 J This paper shows the degree to which lines of magnetic force are concentrated in a magnetic body in a magnetic field, and the more elongated the shape of the magnetic body in the direction of the magnetic field, the stronger the concentration of lines of magnetic force (
This indicates that there is a tendency to It is thought that the above experimental results can be explained if a magnetic field corresponds to an electric field, a magnetic material corresponds to a dielectric material, and magnetic lines of force correspond to lines of electric force.

よって、本発明は、トラフによる小片集合体の輸送方向
とマイクロ波の電界方向をほぼ平行にして出来るだけマ
イクロ波の電界方向に小片集合体の長手方向をそろえて
水分によるマイクロ波の吸収を最大限に引出し、マイク
ロ波に影響を及ぼす他の要因(水分以外による吸収や定
在波)による誤差の割合を縮小させることによって、精
度の高い水分針を提供することを目的とする。
Therefore, the present invention maximizes the absorption of microwaves by moisture by making the transport direction of the small piece aggregate by the trough and the direction of the microwave electric field almost parallel, and aligning the longitudinal direction of the small piece aggregate with the direction of the microwave electric field as much as possible. The purpose of the present invention is to provide a highly accurate moisture needle by reducing the error rate due to other factors that affect microwaves (absorption by moisture and standing waves).

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために、本発明の小片集合体の水分
測定装置は、送信アンテナと受信アンテナを対向させて
マイクロ波の伝播路を形成し、この伝播路途中に測定域
に当たる部分をマイクロ波透過率が高い素材で形成して
なるトラフを配し、このトラフを振動して試料を搬送し
つつ試料がマイクロ波に与える影響を測定する装置にお
いて、トラフの輸送方向とマイクロ波の電界方向とをほ
ぼ平行にしたことを特徴とする。
In order to achieve the above object, the moisture measuring device for a small piece aggregate of the present invention has a transmitting antenna and a receiving antenna facing each other to form a microwave propagation path, and a portion corresponding to the measurement area in the middle of this propagation path. In an apparatus that uses a trough made of a material with high transmittance and vibrates the trough to transport a sample and measure the influence of the sample on microwaves, the transport direction of the trough and the direction of the microwave electric field are It is characterized by being almost parallel.

〔作用〕[Effect]

本発明において、マイクロ波の減衰量の測定を行うには
、送信アンテナから受信アンテナへマイクロ波を伝播し
、一方、トラフを振動させて小片集合体をマイクロ波の
伝播路中に搬送する。すると、マイクロ波は小片集合体
が含有する水分によって影響を受けるため、この影響の
度合をなんらかの形で検出し、その結果に基づいて小片
集合体の水分量又は含水率を求める。この際に小片集合
体は、トラフの輸送方向、すなわち、マイクロ波の電界
方向にその長平方向がそろいやすく、マイクロ波が水分
により受ける影響もその分増加する。
In the present invention, in order to measure the amount of attenuation of microwaves, the microwaves are propagated from the transmitting antenna to the receiving antenna, and the trough is vibrated to convey the small piece assembly into the microwave propagation path. Then, since the microwave is affected by the moisture contained in the small piece aggregate, the degree of this influence is detected in some way, and based on the result, the moisture content or moisture content of the small piece aggregate is determined. At this time, the elongated direction of the small piece aggregate tends to align with the transport direction of the trough, that is, the electric field direction of the microwave, and the influence of the moisture on the microwave increases accordingly.

〔実施例〕〔Example〕

以下、本発明の実施例装置を第1図乃至第3図に基づい
て説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

送信アンテナ1と受信アンテナ2には一例として電磁ホ
ーンが用いられ、これらは適宜の間隔を持って対向され
る。送信アンテナ1にはマイクロ波の発振器3、電源回
路4が接続され、9.4GHzのマイクロ波を発振する
。受信アンテナ2には受信器5、検出値処理装置6が接
続される。なお、電磁ホーンにより放射されたマイクロ
波は、その偏波面が電磁ホーンの開口部の短辺と平行す
るため、電界は第3図に矢印eで示す方向に生しる。
For example, electromagnetic horns are used for the transmitting antenna 1 and the receiving antenna 2, and these antennas are opposed to each other with an appropriate interval. A microwave oscillator 3 and a power supply circuit 4 are connected to the transmitting antenna 1, and oscillates a microwave of 9.4 GHz. A receiver 5 and a detected value processing device 6 are connected to the receiving antenna 2 . Incidentally, since the polarization plane of the microwave radiated by the electromagnetic horn is parallel to the short side of the opening of the electromagnetic horn, an electric field is generated in the direction shown by arrow e in FIG. 3.

1′は送信アンテナlの開口部である。1' is the aperture of the transmitting antenna l.

7はトラフであって全体が板厚1mのポリプロピレンで
形成され、中空枠8に板バネ9によって支持されている
。トラフ7の底面は、輸送方向に傾斜するとともに、輸
送方向中央を最深部とすべ(両側が中心に向けて傾斜し
ており、また、測定域に当たる部分には切欠孔10が設
けられ、この切欠孔10には、発砲スチロールの板11
が輸送を阻害しないように嵌めこまれている。発砲スチ
ロールはマイクロ波透過率が非常に高い材料である。な
お、ポリプロピレンもマイクロ波透過率が高いものであ
り、特別に測定域を異なった材質で構成しなくてもよい
A trough 7 is made entirely of polypropylene with a thickness of 1 m, and is supported by a hollow frame 8 by a leaf spring 9. The bottom surface of the trough 7 is inclined in the transportation direction, and is smooth with the center in the transportation direction being the deepest part (both sides are inclined toward the center, and a notch hole 10 is provided in the part that corresponds to the measurement area. A styrofoam plate 11 is placed in the hole 10.
are fitted so as not to obstruct transportation. Styrofoam is a material with extremely high microwave transmittance. Note that polypropylene also has high microwave transmittance, so the measurement area does not need to be made of a different material.

トラフ7の一端には駆動板14が取りつけられており、
駆動板14は第1図に矢印fで示す方向に細かく往復運
動して、トラフ上の被測定材料を輸送する。
A drive plate 14 is attached to one end of the trough 7,
The drive plate 14 makes fine reciprocating movements in the direction indicated by arrow f in FIG. 1 to transport the material to be measured on the trough.

中空枠8はロードセル12にて支持されており、ロード
セル12は、中空枠8とともにトラフ7その他の部材の
全体MWを測定し、その結果を検出値処理装置6に送る
。13は被測定材料の供給部である。
The hollow frame 8 is supported by a load cell 12, which measures the overall MW of the hollow frame 8, the trough 7, and other members, and sends the results to the detected value processing device 6. Reference numeral 13 is a supply section for the material to be measured.

本実施例では、被測定材料がマイクロ波に与える影響と
して、被測定材料の含有水分がマイクロ波のエネルギー
を減衰する量を測定する。また、本実施例では、被測定
材料の重量も同時に測定しているため、試料が含有する
水分の量だけでなく、試料の含水率をも測定することが
可能であるが、水分量を測定する場合には重量は測定精
度を高めるための補正因子とすることができる。ここで
は、実施例装置によって試料の含水率を測定する方法に
ついて説明する。
In this example, the amount by which the water contained in the material to be measured attenuates the energy of the microwave is measured as the influence that the material to be measured has on microwaves. In addition, in this example, the weight of the material to be measured is also measured at the same time, so it is possible to measure not only the amount of moisture contained in the sample but also the moisture content of the sample. In this case, weight can be used as a correction factor to improve measurement accuracy. Here, a method of measuring the moisture content of a sample using the apparatus of the embodiment will be described.

トラフ7を振動させるとともに、送信アンテナ1より9
.4G+lzのマイクロ波を発振し、供給部13より被
測定材料を供給する。被測定材料は小片集合体であって
、集合体は定形でも不定形でも構わないが、その中にあ
る程度長細形状を持つ小片が含まれているものが通して
いる。被測定材料の例としては茶葉があげられるが、摘
採直後の生葉から製品茶までのいずれの工程の茶菓も測
定対象となる。トラフ7上の被測定材料は、トラフの両
側壁に当たったり、互いにぶつかったりして、輸送方向
にその長手方向をそろえる傾向を持ちながら輸送されて
いく。なお、本実施例では、トラフ7の底面が輸送方向
中央に向けて傾斜しているため、被測定材料はよりその
長手方向を輸送方向にそろえやすくなる。l・ラフ7の
輸送方向は伝播マイクロ波の電界方向と一致しているた
め、マイクロ波の電界方向に被測定材料の長平方向がそ
ろいやすく、マイクロ波が水分により吸収される度合は
より助長される。また、トラフ7の底面は輸送方向中央
に向けて傾斜しており、この輸送方向中央がマイクロ波
の伝播路の中央、すなわち、電界強度が最高の位置に一
致しているため、被測定材料によるマイクロ波の吸収は
、常に最適の状態で行われる。
While vibrating the trough 7, the transmission antenna 9
.. A microwave of 4G+lz is oscillated, and the material to be measured is supplied from the supply section 13. The material to be measured is an aggregate of small pieces, and the aggregate may have a fixed or irregular shape, but one that contains small pieces with a certain elongated shape is passed through. An example of a material to be measured is tea leaves, but tea confections at any stage of the process, from fresh leaves immediately after being picked to finished tea, can also be measured. The material to be measured on the trough 7 is transported while tending to align its longitudinal direction in the transport direction by hitting the side walls of the trough or hitting each other. In this example, since the bottom surface of the trough 7 is inclined toward the center in the transport direction, it becomes easier to align the longitudinal direction of the material to be measured with the transport direction. Since the transport direction of l.rough 7 coincides with the electric field direction of the propagating microwave, the longitudinal direction of the material to be measured is likely to be aligned with the direction of the microwave electric field, and the degree of absorption of microwaves by moisture is further promoted. Ru. In addition, the bottom surface of the trough 7 is inclined toward the center in the transport direction, and the center in the transport direction corresponds to the center of the microwave propagation path, that is, the position where the electric field strength is the highest. Microwave absorption is always optimal.

さて、マイクロ波は、トラフ7上を流れる被測定材料に
よって減衰され、受信アンテナ2を介して受信器5に受
信され、受信マイクロ波エネルギーは検出値mとして次
々に検出値処理装置6に送られていく。ロードセル12
は検出した重量を検出値Wとして次々に検出値処理装置
6に送る。検出値処理装置6では、これらの検出値m、
wをそれぞれ一定時間蓄積し、それぞれの平均を算出し
て測定値Ml、Wlとする。一方、試料がトラフ7上に
載っていない時の受信マイクロ波エネルギーの検出値の
平均値、及び、ロードセル12の検出値の平均値は、そ
れぞれ基準値MO,WOとして、検出値処理装置6に記
憶されている。そして、検出値処理装置6内では、これ
ら値(MO,MIWO,Wl)と含水率の関係式から、
試料の含水率を算出する。この関係式の一例として下式
があげられる。
Now, the microwave is attenuated by the material to be measured flowing on the trough 7, and is received by the receiver 5 via the receiving antenna 2, and the received microwave energy is sent one after another to the detected value processing device 6 as a detected value m. To go. Load cell 12
sequentially sends the detected weights as detected values W to the detected value processing device 6. In the detected value processing device 6, these detected values m,
w is accumulated for a certain period of time, and the respective averages are calculated and used as measured values Ml and Wl. On the other hand, the average value of the detected values of the received microwave energy when the sample is not placed on the trough 7 and the average value of the detected values of the load cell 12 are sent to the detected value processing device 6 as reference values MO and WO, respectively. remembered. Then, in the detected value processing device 6, from the relational expression between these values (MO, MIWO, Wl) and the water content,
Calculate the moisture content of the sample. An example of this relational expression is the following expression.

含水率=a* (MO−Ml)/ (Wl −WO)+
 b ただし、a、bは実験によって求まる定数である。
Moisture content = a* (MO-Ml)/ (Wl -WO)+
b However, a and b are constants determined by experiment.

〔発明の効果〕〔Effect of the invention〕

本発明の小片集合体の水分測定装置によれば、マイクロ
波が被測定材料の含有する水分により吸収される度合を
できる限り高め、誤差の割合を縮小させることができる
ため、精度の高い測定が可能である。
According to the moisture measuring device for small piece aggregates of the present invention, it is possible to increase the degree of absorption of microwaves by the moisture contained in the material to be measured as much as possible and reduce the error rate, so that highly accurate measurement is possible. It is possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第3図は本発明の実施例を示し第1図は正面
図、第2図は一部断面図、第3図はトラフの平面図であ
る。第4図、第5図は実験装置を示し、第4図は平面図
、第5図は側面図である。 第6図は実験結果を示す表、第7図は第6図をグラフ化
したものである。 1・・・送信アンテナ 2・・・受信アンテナ 7・・
・トラフ e・・・マイクロ波の電界方向を示す矢印(
−一、−m−) 第 図 嘗腎万同
1 to 3 show an embodiment of the present invention; FIG. 1 is a front view, FIG. 2 is a partially sectional view, and FIG. 3 is a plan view of a trough. FIGS. 4 and 5 show the experimental apparatus, with FIG. 4 being a plan view and FIG. 5 being a side view. FIG. 6 is a table showing the experimental results, and FIG. 7 is a graph of FIG. 6. 1... Transmitting antenna 2... Receiving antenna 7...
・Trough e...Arrow indicating the direction of the microwave electric field (
-1, -m-) Figure 1, -m-)

Claims (1)

【特許請求の範囲】[Claims] (1)送信アンテナと受信アンテナを対向させてマイク
ロ波の伝播路を形成し、この伝播路途中に測定域に当た
る部分をマイクロ波透過率が高い素材で形成してなるト
ラフを配し、このトラフを振動して試料を搬送しつつ試
料の含有水分がマイクロ波に与える影響を測定する装置
において、トラフの輸送方向とマイクロ波の電界方向と
をほぼ平行にしたことを特徴とする、小片集合体の水分
測定装置。
(1) A transmitting antenna and a receiving antenna are made to face each other to form a microwave propagation path, and a trough made of a material with high microwave transmittance is arranged in the part corresponding to the measurement area in the middle of this propagation path. A device for measuring the influence of water content in a sample on microwaves while transporting the sample by vibrating the trough, characterized in that the transport direction of the trough and the direction of the electric field of the microwave are approximately parallel to each other. Moisture measuring device.
JP23282988A 1988-09-17 1988-09-17 Apparatus for measuring moisture of fragmentary aggregate Pending JPH0280943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23282988A JPH0280943A (en) 1988-09-17 1988-09-17 Apparatus for measuring moisture of fragmentary aggregate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23282988A JPH0280943A (en) 1988-09-17 1988-09-17 Apparatus for measuring moisture of fragmentary aggregate

Publications (1)

Publication Number Publication Date
JPH0280943A true JPH0280943A (en) 1990-03-22

Family

ID=16945439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23282988A Pending JPH0280943A (en) 1988-09-17 1988-09-17 Apparatus for measuring moisture of fragmentary aggregate

Country Status (1)

Country Link
JP (1) JPH0280943A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321220A (en) * 1992-03-30 1994-06-14 Unisia Jecs Corporation Pressure switch
EP0976687A1 (en) 1998-07-29 2000-02-02 Shin-Etsu Chemical Co., Ltd. Synthetic fused silica member, method for producing the same and optical member for excimer laser

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441796A (en) * 1977-09-09 1979-04-03 Hitachi Ltd Microwave water content measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441796A (en) * 1977-09-09 1979-04-03 Hitachi Ltd Microwave water content measuring apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321220A (en) * 1992-03-30 1994-06-14 Unisia Jecs Corporation Pressure switch
EP0976687A1 (en) 1998-07-29 2000-02-02 Shin-Etsu Chemical Co., Ltd. Synthetic fused silica member, method for producing the same and optical member for excimer laser

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