JPH0280245U - - Google Patents

Info

Publication number
JPH0280245U
JPH0280245U JP16056788U JP16056788U JPH0280245U JP H0280245 U JPH0280245 U JP H0280245U JP 16056788 U JP16056788 U JP 16056788U JP 16056788 U JP16056788 U JP 16056788U JP H0280245 U JPH0280245 U JP H0280245U
Authority
JP
Japan
Prior art keywords
pulley
slide
idler pulley
screw groove
idler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16056788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452514Y2 (US08063081-20111122-C00044.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988160567U priority Critical patent/JPH0452514Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0280245U publication Critical patent/JPH0280245U/ja
Application granted granted Critical
Publication of JPH0452514Y2 publication Critical patent/JPH0452514Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
JP1988160567U 1988-12-09 1988-12-09 Expired JPH0452514Y2 (US08063081-20111122-C00044.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (US08063081-20111122-C00044.png) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (US08063081-20111122-C00044.png) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0280245U true JPH0280245U (US08063081-20111122-C00044.png) 1990-06-20
JPH0452514Y2 JPH0452514Y2 (US08063081-20111122-C00044.png) 1992-12-10

Family

ID=31442743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988160567U Expired JPH0452514Y2 (US08063081-20111122-C00044.png) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0452514Y2 (US08063081-20111122-C00044.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (US08063081-20111122-C00044.png) * 1986-09-17 1988-03-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (US08063081-20111122-C00044.png) * 1986-09-17 1988-03-31

Also Published As

Publication number Publication date
JPH0452514Y2 (US08063081-20111122-C00044.png) 1992-12-10

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