JPH0279197U - - Google Patents

Info

Publication number
JPH0279197U
JPH0279197U JP16025388U JP16025388U JPH0279197U JP H0279197 U JPH0279197 U JP H0279197U JP 16025388 U JP16025388 U JP 16025388U JP 16025388 U JP16025388 U JP 16025388U JP H0279197 U JPH0279197 U JP H0279197U
Authority
JP
Japan
Prior art keywords
electrostatic
adsorption
holding device
voltage power
adsorption layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16025388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16025388U priority Critical patent/JPH0279197U/ja
Publication of JPH0279197U publication Critical patent/JPH0279197U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP16025388U 1988-12-08 1988-12-08 Pending JPH0279197U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16025388U JPH0279197U (US06623731-20030923-C00012.png) 1988-12-08 1988-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16025388U JPH0279197U (US06623731-20030923-C00012.png) 1988-12-08 1988-12-08

Publications (1)

Publication Number Publication Date
JPH0279197U true JPH0279197U (US06623731-20030923-C00012.png) 1990-06-18

Family

ID=31442158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16025388U Pending JPH0279197U (US06623731-20030923-C00012.png) 1988-12-08 1988-12-08

Country Status (1)

Country Link
JP (1) JPH0279197U (US06623731-20030923-C00012.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107623A (ja) * 1984-10-30 1986-05-26 日本電気株式会社 遅延動作型圧電リレ−の入力回路
JPS6244332A (ja) * 1985-08-23 1987-02-26 Canon Inc 静電吸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107623A (ja) * 1984-10-30 1986-05-26 日本電気株式会社 遅延動作型圧電リレ−の入力回路
JPS6244332A (ja) * 1985-08-23 1987-02-26 Canon Inc 静電吸着装置

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