JPH0278946U - - Google Patents
Info
- Publication number
- JPH0278946U JPH0278946U JP15899688U JP15899688U JPH0278946U JP H0278946 U JPH0278946 U JP H0278946U JP 15899688 U JP15899688 U JP 15899688U JP 15899688 U JP15899688 U JP 15899688U JP H0278946 U JPH0278946 U JP H0278946U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- mask
- pattern
- patterned
- transferring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15899688U JPH0278946U (no) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15899688U JPH0278946U (no) | 1988-12-08 | 1988-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278946U true JPH0278946U (no) | 1990-06-18 |
Family
ID=31439817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15899688U Pending JPH0278946U (no) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278946U (no) |
-
1988
- 1988-12-08 JP JP15899688U patent/JPH0278946U/ja active Pending