JPH0278885U

JPH0278885U -

Info

Publication number: JPH0278885U
Application number: JP15832688U
Authority: JP
Priority date: 1988-12-05
Filing date: 1988-12-05
Publication date: 1990-06-18
Anticipated expiration: 2003-11-12
Also published as: JPH0544628Y2

Description

[Brief explanation of drawings]

第１図は本考案の実施例による超高真空バルブ
の部分断面図、第２図は第１図における―線
方向断面図、第３図は同―線方向断面図、第
４図は本実施例の真空バルブの各部材の分解斜視
図、第５Ａ図、第５Ｂ図はこれら部材の組立て手
順を示す断面図、第６図は従来例の真空バルブの
断面図、第７図は同バルブの各部材の分解斜視図
、第８Ａ図乃至第８Ｄ図は各部材の組立て手順を
示す断面図である。なお図において、５８……弁体、６２……係合
板、６２ａ……孔、６３……弁体駆動軸、６３ａ
……軸頭部。 Fig. 1 is a partial cross-sectional view of an ultra-high vacuum valve according to an embodiment of the present invention, Fig. 2 is a cross-sectional view in the line direction of Fig. 1, Fig. 3 is a cross-sectional view in the line direction of the same, and Fig. 4 is a cross-sectional view of the ultra-high vacuum valve according to the embodiment of the present invention. Figures 5A and 5B are exploded perspective views of each member of the example vacuum valve, sectional views showing the assembly procedure of these members, Figure 6 is a sectional view of the conventional vacuum valve, and Figure 7 is the same valve. The exploded perspective views of each member and FIGS. 8A to 8D are cross-sectional views showing the assembly procedure of each member. In the figure, 58...valve body, 62...engaging plate, 62a...hole, 63...valve body drive shaft, 63a
...shaft head.

Claims

[Scope of utility model registration request]

A valve body, a valve body disposed within the valve body, a valve seat formed in an opening of the valve body, and a valve body having a shaft head positioned in a recess formed in the valve body. a drive shaft; an engagement plate that is fixed to the valve body and has a hole through which the valve body drive shaft is inserted, and that prevents the shaft head of the valve body drive shaft from coming off from the recess; and the valve body drive a valve body drive unit that reciprocates a shaft in its axial direction to seat the valve body on the valve seat and separate it from the valve seat; and an annular member that slidably guides and supports the valve body drive shaft. and a bellows having both ends fixed to the annular member and the valve body and surrounding the valve body drive shaft, wherein the cross-sectional shape of the shaft head of the valve body drive shaft is non-circular. and the shape of the hole in the engagement plate is non-circular and allows the shaft head to be inserted therethrough, and when assembled, the shaft head is inserted into the hole in the engagement plate and positioned in the recess of the valve body. After that, rotate the valve body drive shaft around its axis,
A vacuum valve characterized in that the shaft head is prevented from coming out of the recess by the engagement plate by rotating at a certain angle.