JPH0278559U - - Google Patents
Info
- Publication number
- JPH0278559U JPH0278559U JP15482988U JP15482988U JPH0278559U JP H0278559 U JPH0278559 U JP H0278559U JP 15482988 U JP15482988 U JP 15482988U JP 15482988 U JP15482988 U JP 15482988U JP H0278559 U JPH0278559 U JP H0278559U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- storage container
- cvd equipment
- material storage
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15482988U JPH0278559U (en, 2012) | 1988-11-30 | 1988-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15482988U JPH0278559U (en, 2012) | 1988-11-30 | 1988-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278559U true JPH0278559U (en, 2012) | 1990-06-15 |
Family
ID=31431914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15482988U Pending JPH0278559U (en, 2012) | 1988-11-30 | 1988-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278559U (en, 2012) |
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1988
- 1988-11-30 JP JP15482988U patent/JPH0278559U/ja active Pending